1/6/2011	12:11:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	12:11:20 AM	Recipe started at 12:11 AM
1/6/2011	12:11:20 AM	Helium valve closed
1/6/2011	12:11:20 AM	H2 valve closed
1/6/2011	12:11:20 AM	BCl3 valve closed
1/6/2011	12:11:20 AM	PH3 valve closed
1/6/2011	12:11:20 AM	SiCl4 pre valve closed
1/6/2011	12:11:20 AM	SiCl4 post valve closed
1/6/2011	12:11:20 AM	Main Vac valve closed
1/6/2011	12:11:20 AM	Bubbler valve closed
1/6/2011	12:11:20 AM	Bypass valve opened
1/6/2011	12:11:20 AM	Helium MFC set to  0.000000
1/6/2011	12:11:20 AM	H2 MFC set to  0.000000
1/6/2011	12:11:20 AM	BCl3 MFC set to  0.000000
1/6/2011	12:11:20 AM	PHl3 MFC set to  0.000000
1/6/2011	12:11:20 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:11:20 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:11:21 AM	Tube furnace set to 0
1/6/2011	12:11:21 AM	Helium valve closed
1/6/2011	12:11:21 AM	H2 valve closed
1/6/2011	12:11:21 AM	BCl3 valve closed
1/6/2011	12:11:21 AM	PH3 valve closed
1/6/2011	12:11:21 AM	SiCl4 pre valve closed
1/6/2011	12:11:21 AM	SiCl4 post valve closed
1/6/2011	12:11:21 AM	Bubbler valve closed
1/6/2011	12:11:21 AM	Main Vac valve opened
1/6/2011	12:11:21 AM	Bypass valve opened
1/6/2011	12:11:21 AM	Helium MFC set to  0.000000
1/6/2011	12:11:21 AM	H2 MFC set to  0.000000
1/6/2011	12:11:21 AM	BCl3 MFC set to  0.000000
1/6/2011	12:11:21 AM	PHl3 MFC set to  0.000000
1/6/2011	12:11:21 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:11:21 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:11:21 AM	Tube furnace set to 0
1/6/2011	12:12:21 AM	H2 valve closed
1/6/2011	12:12:21 AM	BCl3 valve closed
1/6/2011	12:12:21 AM	PH3 valve closed
1/6/2011	12:12:21 AM	SiCl4 pre valve closed
1/6/2011	12:12:21 AM	SiCl4 post valve closed
1/6/2011	12:12:21 AM	Bubbler valve closed
1/6/2011	12:12:21 AM	Helium valve opened
1/6/2011	12:12:21 AM	Main Vac valve opened
1/6/2011	12:12:21 AM	Bypass valve opened
1/6/2011	12:12:21 AM	Helium MFC set to  100.000000
1/6/2011	12:12:21 AM	H2 MFC set to  0.000000
1/6/2011	12:12:21 AM	BCl3 MFC set to  0.000000
1/6/2011	12:12:21 AM	PHl3 MFC set to  0.000000
1/6/2011	12:12:21 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:12:21 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:12:21 AM	Tube furnace set to 0
1/6/2011	12:13:21 AM	Helium valve closed
1/6/2011	12:13:21 AM	H2 valve closed
1/6/2011	12:13:21 AM	BCl3 valve closed
1/6/2011	12:13:21 AM	PH3 valve closed
1/6/2011	12:13:21 AM	SiCl4 pre valve closed
1/6/2011	12:13:21 AM	SiCl4 post valve closed
1/6/2011	12:13:21 AM	Bubbler valve closed
1/6/2011	12:13:21 AM	Main Vac valve opened
1/6/2011	12:13:21 AM	Bypass valve opened
1/6/2011	12:13:21 AM	Helium MFC set to  0.000000
1/6/2011	12:13:21 AM	H2 MFC set to  0.000000
1/6/2011	12:13:21 AM	BCl3 MFC set to  0.000000
1/6/2011	12:13:21 AM	PHl3 MFC set to  0.000000
1/6/2011	12:13:21 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:13:21 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:13:21 AM	Tube furnace set to 0
1/6/2011	12:14:21 AM	H2 valve closed
1/6/2011	12:14:21 AM	BCl3 valve closed
1/6/2011	12:14:21 AM	PH3 valve closed
1/6/2011	12:14:21 AM	SiCl4 pre valve closed
1/6/2011	12:14:21 AM	SiCl4 post valve closed
1/6/2011	12:14:21 AM	Bubbler valve closed
1/6/2011	12:14:21 AM	Helium valve opened
1/6/2011	12:14:21 AM	Main Vac valve opened
1/6/2011	12:14:21 AM	Bypass valve opened
1/6/2011	12:14:21 AM	Helium MFC set to  100.000000
1/6/2011	12:14:21 AM	H2 MFC set to  0.000000
1/6/2011	12:14:21 AM	BCl3 MFC set to  0.000000
1/6/2011	12:14:21 AM	PHl3 MFC set to  0.000000
1/6/2011	12:14:21 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:14:22 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:14:22 AM	Tube furnace set to 0
1/6/2011	12:15:22 AM	Helium valve closed
1/6/2011	12:15:22 AM	H2 valve closed
1/6/2011	12:15:22 AM	BCl3 valve closed
1/6/2011	12:15:22 AM	PH3 valve closed
1/6/2011	12:15:22 AM	SiCl4 pre valve closed
1/6/2011	12:15:22 AM	SiCl4 post valve closed
1/6/2011	12:15:22 AM	Bubbler valve closed
1/6/2011	12:15:22 AM	Main Vac valve opened
1/6/2011	12:15:22 AM	Bypass valve opened
1/6/2011	12:15:22 AM	Helium MFC set to  0.000000
1/6/2011	12:15:22 AM	H2 MFC set to  0.000000
1/6/2011	12:15:22 AM	BCl3 MFC set to  0.000000
1/6/2011	12:15:22 AM	PHl3 MFC set to  0.000000
1/6/2011	12:15:22 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:15:22 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:15:22 AM	Tube furnace set to 0
1/6/2011	12:16:22 AM	H2 valve closed
1/6/2011	12:16:22 AM	BCl3 valve closed
1/6/2011	12:16:22 AM	PH3 valve closed
1/6/2011	12:16:22 AM	SiCl4 pre valve closed
1/6/2011	12:16:22 AM	SiCl4 post valve closed
1/6/2011	12:16:22 AM	Bubbler valve closed
1/6/2011	12:16:22 AM	Helium valve opened
1/6/2011	12:16:22 AM	Main Vac valve opened
1/6/2011	12:16:22 AM	Bypass valve opened
1/6/2011	12:16:22 AM	Helium MFC set to  100.000000
1/6/2011	12:16:22 AM	H2 MFC set to  0.000000
1/6/2011	12:16:22 AM	BCl3 MFC set to  0.000000
1/6/2011	12:16:22 AM	PHl3 MFC set to  0.000000
1/6/2011	12:16:22 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:16:22 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:16:22 AM	Tube furnace set to 0
1/6/2011	12:17:22 AM	Helium valve closed
1/6/2011	12:17:22 AM	H2 valve closed
1/6/2011	12:17:22 AM	BCl3 valve closed
1/6/2011	12:17:22 AM	PH3 valve closed
1/6/2011	12:17:22 AM	SiCl4 pre valve closed
1/6/2011	12:17:22 AM	SiCl4 post valve closed
1/6/2011	12:17:22 AM	Bubbler valve closed
1/6/2011	12:17:22 AM	Main Vac valve opened
1/6/2011	12:17:22 AM	Bypass valve opened
1/6/2011	12:17:22 AM	Helium MFC set to  0.000000
1/6/2011	12:17:22 AM	H2 MFC set to  0.000000
1/6/2011	12:17:22 AM	BCl3 MFC set to  0.000000
1/6/2011	12:17:22 AM	PHl3 MFC set to  0.000000
1/6/2011	12:17:22 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:17:22 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:17:22 AM	Tube furnace set to 0
1/6/2011	12:18:22 AM	H2 valve closed
1/6/2011	12:18:22 AM	BCl3 valve closed
1/6/2011	12:18:22 AM	PH3 valve closed
1/6/2011	12:18:22 AM	SiCl4 pre valve closed
1/6/2011	12:18:22 AM	SiCl4 post valve closed
1/6/2011	12:18:22 AM	Bubbler valve closed
1/6/2011	12:18:22 AM	Helium valve opened
1/6/2011	12:18:22 AM	Main Vac valve opened
1/6/2011	12:18:22 AM	Bypass valve opened
1/6/2011	12:18:22 AM	Helium MFC set to  100.000000
1/6/2011	12:18:22 AM	H2 MFC set to  0.000000
1/6/2011	12:18:22 AM	BCl3 MFC set to  0.000000
1/6/2011	12:18:22 AM	PHl3 MFC set to  0.000000
1/6/2011	12:18:22 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:18:22 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:18:22 AM	Tube furnace set to 0
1/6/2011	12:19:22 AM	Helium valve closed
1/6/2011	12:19:23 AM	H2 valve closed
1/6/2011	12:19:23 AM	BCl3 valve closed
1/6/2011	12:19:23 AM	PH3 valve closed
1/6/2011	12:19:23 AM	SiCl4 pre valve closed
1/6/2011	12:19:23 AM	SiCl4 post valve closed
1/6/2011	12:19:23 AM	Bubbler valve closed
1/6/2011	12:19:23 AM	Main Vac valve opened
1/6/2011	12:19:23 AM	Bypass valve opened
1/6/2011	12:19:23 AM	Helium MFC set to  0.000000
1/6/2011	12:19:23 AM	H2 MFC set to  0.000000
1/6/2011	12:19:23 AM	BCl3 MFC set to  0.000000
1/6/2011	12:19:23 AM	PHl3 MFC set to  0.000000
1/6/2011	12:19:23 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:19:23 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:19:23 AM	Tube furnace set to 0
1/6/2011	12:20:23 AM	H2 valve closed
1/6/2011	12:20:23 AM	BCl3 valve closed
1/6/2011	12:20:23 AM	PH3 valve closed
1/6/2011	12:20:23 AM	SiCl4 pre valve closed
1/6/2011	12:20:23 AM	SiCl4 post valve closed
1/6/2011	12:20:23 AM	Bubbler valve closed
1/6/2011	12:20:23 AM	Helium valve opened
1/6/2011	12:20:23 AM	Main Vac valve opened
1/6/2011	12:20:23 AM	Bypass valve opened
1/6/2011	12:20:23 AM	Helium MFC set to  100.000000
1/6/2011	12:20:23 AM	H2 MFC set to  0.000000
1/6/2011	12:20:23 AM	BCl3 MFC set to  0.000000
1/6/2011	12:20:23 AM	PHl3 MFC set to  0.000000
1/6/2011	12:20:23 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:20:23 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:20:23 AM	Tube furnace set to 0
1/6/2011	12:21:23 AM	Helium valve closed
1/6/2011	12:21:23 AM	H2 valve closed
1/6/2011	12:21:23 AM	BCl3 valve closed
1/6/2011	12:21:23 AM	PH3 valve closed
1/6/2011	12:21:23 AM	SiCl4 pre valve closed
1/6/2011	12:21:23 AM	SiCl4 post valve closed
1/6/2011	12:21:23 AM	Bubbler valve closed
1/6/2011	12:21:23 AM	Main Vac valve opened
1/6/2011	12:21:23 AM	Bypass valve opened
1/6/2011	12:21:23 AM	Helium MFC set to  0.000000
1/6/2011	12:21:23 AM	H2 MFC set to  0.000000
1/6/2011	12:21:23 AM	BCl3 MFC set to  0.000000
1/6/2011	12:21:23 AM	PHl3 MFC set to  0.000000
1/6/2011	12:21:23 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:21:23 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:21:23 AM	Tube furnace set to 0
1/6/2011	12:22:23 AM	H2 valve closed
1/6/2011	12:22:23 AM	BCl3 valve closed
1/6/2011	12:22:23 AM	PH3 valve closed
1/6/2011	12:22:23 AM	SiCl4 pre valve closed
1/6/2011	12:22:23 AM	SiCl4 post valve closed
1/6/2011	12:22:23 AM	Bubbler valve closed
1/6/2011	12:22:23 AM	Helium valve opened
1/6/2011	12:22:23 AM	Main Vac valve opened
1/6/2011	12:22:23 AM	Bypass valve opened
1/6/2011	12:22:23 AM	Helium MFC set to  100.000000
1/6/2011	12:22:23 AM	H2 MFC set to  0.000000
1/6/2011	12:22:23 AM	BCl3 MFC set to  0.000000
1/6/2011	12:22:23 AM	PHl3 MFC set to  0.000000
1/6/2011	12:22:23 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:22:23 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:22:23 AM	Tube furnace set to 0
1/6/2011	12:23:23 AM	Helium valve closed
1/6/2011	12:23:23 AM	H2 valve closed
1/6/2011	12:23:23 AM	BCl3 valve closed
1/6/2011	12:23:23 AM	PH3 valve closed
1/6/2011	12:23:23 AM	SiCl4 pre valve closed
1/6/2011	12:23:23 AM	SiCl4 post valve closed
1/6/2011	12:23:23 AM	Bubbler valve closed
1/6/2011	12:23:23 AM	Main Vac valve opened
1/6/2011	12:23:23 AM	Bypass valve opened
1/6/2011	12:23:23 AM	Helium MFC set to  0.000000
1/6/2011	12:23:23 AM	H2 MFC set to  0.000000
1/6/2011	12:23:23 AM	BCl3 MFC set to  0.000000
1/6/2011	12:23:23 AM	PHl3 MFC set to  0.000000
1/6/2011	12:23:23 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:23:23 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:23:23 AM	Tube furnace set to 0
1/6/2011	12:24:24 AM	H2 valve closed
1/6/2011	12:24:24 AM	BCl3 valve closed
1/6/2011	12:24:24 AM	PH3 valve closed
1/6/2011	12:24:24 AM	SiCl4 pre valve closed
1/6/2011	12:24:24 AM	SiCl4 post valve closed
1/6/2011	12:24:24 AM	Bubbler valve closed
1/6/2011	12:24:24 AM	Helium valve opened
1/6/2011	12:24:24 AM	Main Vac valve opened
1/6/2011	12:24:24 AM	Bypass valve opened
1/6/2011	12:24:24 AM	Helium MFC set to  100.000000
1/6/2011	12:24:24 AM	H2 MFC set to  0.000000
1/6/2011	12:24:24 AM	BCl3 MFC set to  0.000000
1/6/2011	12:24:24 AM	PHl3 MFC set to  0.000000
1/6/2011	12:24:24 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:24:24 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:24:24 AM	Tube furnace set to 0
1/6/2011	12:25:24 AM	Helium valve closed
1/6/2011	12:25:24 AM	H2 valve closed
1/6/2011	12:25:24 AM	BCl3 valve closed
1/6/2011	12:25:24 AM	PH3 valve closed
1/6/2011	12:25:24 AM	SiCl4 pre valve closed
1/6/2011	12:25:24 AM	SiCl4 post valve closed
1/6/2011	12:25:24 AM	Bubbler valve closed
1/6/2011	12:25:24 AM	Main Vac valve opened
1/6/2011	12:25:24 AM	Bypass valve opened
1/6/2011	12:25:24 AM	Helium MFC set to  0.000000
1/6/2011	12:25:24 AM	H2 MFC set to  0.000000
1/6/2011	12:25:24 AM	BCl3 MFC set to  0.000000
1/6/2011	12:25:24 AM	PHl3 MFC set to  0.000000
1/6/2011	12:25:24 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:25:24 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:25:24 AM	Tube furnace set to 0
1/6/2011	12:26:24 AM	H2 valve closed
1/6/2011	12:26:24 AM	BCl3 valve closed
1/6/2011	12:26:24 AM	PH3 valve closed
1/6/2011	12:26:24 AM	SiCl4 pre valve closed
1/6/2011	12:26:24 AM	SiCl4 post valve closed
1/6/2011	12:26:24 AM	Bubbler valve closed
1/6/2011	12:26:24 AM	Helium valve opened
1/6/2011	12:26:24 AM	Main Vac valve opened
1/6/2011	12:26:24 AM	Bypass valve opened
1/6/2011	12:26:24 AM	Helium MFC set to  100.000000
1/6/2011	12:26:24 AM	H2 MFC set to  0.000000
1/6/2011	12:26:24 AM	BCl3 MFC set to  0.000000
1/6/2011	12:26:24 AM	PHl3 MFC set to  0.000000
1/6/2011	12:26:24 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:26:24 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:26:24 AM	Tube furnace set to 0
1/6/2011	12:27:24 AM	Helium valve closed
1/6/2011	12:27:24 AM	H2 valve closed
1/6/2011	12:27:24 AM	BCl3 valve closed
1/6/2011	12:27:24 AM	PH3 valve closed
1/6/2011	12:27:24 AM	SiCl4 pre valve closed
1/6/2011	12:27:24 AM	SiCl4 post valve closed
1/6/2011	12:27:24 AM	Bubbler valve closed
1/6/2011	12:27:24 AM	Main Vac valve opened
1/6/2011	12:27:24 AM	Bypass valve opened
1/6/2011	12:27:24 AM	Helium MFC set to  0.000000
1/6/2011	12:27:24 AM	H2 MFC set to  0.000000
1/6/2011	12:27:24 AM	BCl3 MFC set to  0.000000
1/6/2011	12:27:24 AM	PHl3 MFC set to  0.000000
1/6/2011	12:27:24 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:27:24 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:27:24 AM	Tube furnace set to 0
1/6/2011	12:28:24 AM	H2 valve closed
1/6/2011	12:28:24 AM	BCl3 valve closed
1/6/2011	12:28:24 AM	PH3 valve closed
1/6/2011	12:28:24 AM	SiCl4 pre valve closed
1/6/2011	12:28:24 AM	SiCl4 post valve closed
1/6/2011	12:28:24 AM	Bubbler valve closed
1/6/2011	12:28:24 AM	Helium valve opened
1/6/2011	12:28:24 AM	Main Vac valve opened
1/6/2011	12:28:24 AM	Bypass valve opened
1/6/2011	12:28:24 AM	Helium MFC set to  100.000000
1/6/2011	12:28:24 AM	H2 MFC set to  0.000000
1/6/2011	12:28:24 AM	BCl3 MFC set to  0.000000
1/6/2011	12:28:24 AM	PHl3 MFC set to  0.000000
1/6/2011	12:28:24 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:28:24 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:28:25 AM	Tube furnace set to 0
1/6/2011	12:29:25 AM	Helium valve closed
1/6/2011	12:29:25 AM	H2 valve closed
1/6/2011	12:29:25 AM	BCl3 valve closed
1/6/2011	12:29:25 AM	PH3 valve closed
1/6/2011	12:29:25 AM	SiCl4 pre valve closed
1/6/2011	12:29:25 AM	SiCl4 post valve closed
1/6/2011	12:29:25 AM	Bubbler valve closed
1/6/2011	12:29:25 AM	Main Vac valve opened
1/6/2011	12:29:25 AM	Bypass valve opened
1/6/2011	12:29:25 AM	Helium MFC set to  0.000000
1/6/2011	12:29:25 AM	H2 MFC set to  0.000000
1/6/2011	12:29:25 AM	BCl3 MFC set to  0.000000
1/6/2011	12:29:25 AM	PHl3 MFC set to  0.000000
1/6/2011	12:29:25 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:29:25 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:29:25 AM	Tube furnace set to 0
1/6/2011	12:30:25 AM	H2 valve closed
1/6/2011	12:30:25 AM	BCl3 valve closed
1/6/2011	12:30:25 AM	PH3 valve closed
1/6/2011	12:30:25 AM	SiCl4 pre valve closed
1/6/2011	12:30:25 AM	SiCl4 post valve closed
1/6/2011	12:30:25 AM	Bubbler valve closed
1/6/2011	12:30:25 AM	Helium valve opened
1/6/2011	12:30:25 AM	Main Vac valve opened
1/6/2011	12:30:25 AM	Bypass valve opened
1/6/2011	12:30:25 AM	Helium MFC set to  100.000000
1/6/2011	12:30:25 AM	H2 MFC set to  0.000000
1/6/2011	12:30:25 AM	BCl3 MFC set to  0.000000
1/6/2011	12:30:25 AM	PHl3 MFC set to  0.000000
1/6/2011	12:30:25 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:30:25 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:30:25 AM	Tube furnace set to 0
1/6/2011	12:31:25 AM	Helium valve closed
1/6/2011	12:31:25 AM	H2 valve closed
1/6/2011	12:31:25 AM	BCl3 valve closed
1/6/2011	12:31:25 AM	PH3 valve closed
1/6/2011	12:31:25 AM	SiCl4 pre valve closed
1/6/2011	12:31:25 AM	SiCl4 post valve closed
1/6/2011	12:31:25 AM	Bubbler valve closed
1/6/2011	12:31:25 AM	Main Vac valve opened
1/6/2011	12:31:25 AM	Bypass valve opened
1/6/2011	12:31:25 AM	Helium MFC set to  0.000000
1/6/2011	12:31:25 AM	H2 MFC set to  0.000000
1/6/2011	12:31:25 AM	BCl3 MFC set to  0.000000
1/6/2011	12:31:25 AM	PHl3 MFC set to  0.000000
1/6/2011	12:31:25 AM	SiCl4 MFC set to  0.000000
1/6/2011	12:31:25 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	12:31:25 AM	Tube furnace set to 0
1/6/2011	12:31:26 AM	Run finished at 12:31 AM
1/6/2011	12:31:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	2:29:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/6/2011	2:29:13 AM	Recipe started at 2:29 AM
1/6/2011	2:29:13 AM	Helium valve closed
1/6/2011	2:29:13 AM	H2 valve closed
1/6/2011	2:29:13 AM	BCl3 valve closed
1/6/2011	2:29:13 AM	PH3 valve closed
1/6/2011	2:29:13 AM	SiCl4 pre valve closed
1/6/2011	2:29:13 AM	SiCl4 post valve closed
1/6/2011	2:29:13 AM	Main Vac valve closed
1/6/2011	2:29:13 AM	Bypass valve closed
1/6/2011	2:29:13 AM	Bubbler valve closed
1/6/2011	2:29:13 AM	Helium MFC set to  0.000000
1/6/2011	2:29:13 AM	H2 MFC set to  0.000000
1/6/2011	2:29:13 AM	BCl3 MFC set to  0.000000
1/6/2011	2:29:13 AM	PHl3 MFC set to  0.000000
1/6/2011	2:29:13 AM	SiCl4 MFC set to  0.000000
1/6/2011	2:29:13 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	2:29:13 AM	Tube furnace set to 0
1/6/2011	2:29:13 AM	Run finished at 2:29 AM
1/6/2011	2:29:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/6/2011	2:29:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	2:29:37 AM	Recipe started at 2:29 AM
1/6/2011	2:29:37 AM	Helium valve closed
1/6/2011	2:29:37 AM	H2 valve closed
1/6/2011	2:29:37 AM	BCl3 valve closed
1/6/2011	2:29:37 AM	PH3 valve closed
1/6/2011	2:29:37 AM	SiCl4 pre valve closed
1/6/2011	2:29:37 AM	SiCl4 post valve closed
1/6/2011	2:29:37 AM	Main Vac valve closed
1/6/2011	2:29:37 AM	Bubbler valve closed
1/6/2011	2:29:37 AM	Bypass valve opened
1/6/2011	2:29:37 AM	Helium MFC set to  0.000000
1/6/2011	2:29:37 AM	H2 MFC set to  0.000000
1/6/2011	2:29:37 AM	BCl3 MFC set to  0.000000
1/6/2011	2:29:37 AM	PHl3 MFC set to  0.000000
1/6/2011	2:29:37 AM	SiCl4 MFC set to  0.000000
1/6/2011	2:29:37 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	2:29:37 AM	Tube furnace set to 0
1/6/2011	2:29:37 AM	Helium valve closed
1/6/2011	2:29:37 AM	H2 valve closed
1/6/2011	2:29:37 AM	BCl3 valve closed
1/6/2011	2:29:37 AM	PH3 valve closed
1/6/2011	2:29:37 AM	SiCl4 pre valve closed
1/6/2011	2:29:37 AM	SiCl4 post valve closed
1/6/2011	2:29:37 AM	Bubbler valve closed
1/6/2011	2:29:37 AM	Main Vac valve opened
1/6/2011	2:29:37 AM	Bypass valve opened
1/6/2011	2:29:37 AM	Helium MFC set to  0.000000
1/6/2011	2:29:37 AM	H2 MFC set to  0.000000
1/6/2011	2:29:37 AM	BCl3 MFC set to  0.000000
1/6/2011	2:29:37 AM	PHl3 MFC set to  0.000000
1/6/2011	2:29:37 AM	SiCl4 MFC set to  0.000000
1/6/2011	2:29:37 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	2:29:37 AM	Tube furnace set to 0
1/6/2011	2:29:37 AM	Run finished at 2:29 AM
1/6/2011	2:29:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	2:32:31 AM	Recipe started at 2:32 AM
1/6/2011	2:32:31 AM	Helium valve closed
1/6/2011	2:32:31 AM	BCl3 valve closed
1/6/2011	2:32:31 AM	PH3 valve closed
1/6/2011	2:32:31 AM	SiCl4 pre valve closed
1/6/2011	2:32:31 AM	SiCl4 post valve closed
1/6/2011	2:32:31 AM	Main Vac valve closed
1/6/2011	2:32:31 AM	Bypass valve closed
1/6/2011	2:32:31 AM	Bubbler valve closed
1/6/2011	2:32:31 AM	H2 valve opened
1/6/2011	2:32:31 AM	Helium MFC set to  0.000000
1/6/2011	2:32:31 AM	H2 MFC set to  500.000000
1/6/2011	2:32:31 AM	BCl3 MFC set to  0.000000
1/6/2011	2:32:31 AM	PHl3 MFC set to  0.000000
1/6/2011	2:32:31 AM	SiCl4 MFC set to  0.000000
1/6/2011	2:32:31 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	2:32:31 AM	Tube furnace set to 0
1/6/2011	2:33:54 AM	Helium valve closed
1/6/2011	2:33:54 AM	BCl3 valve closed
1/6/2011	2:33:54 AM	PH3 valve closed
1/6/2011	2:33:54 AM	SiCl4 pre valve closed
1/6/2011	2:33:54 AM	SiCl4 post valve closed
1/6/2011	2:33:54 AM	Main Vac valve closed
1/6/2011	2:33:54 AM	Bypass valve closed
1/6/2011	2:33:54 AM	H2 valve opened
1/6/2011	2:33:54 AM	Bubbler valve opened
1/6/2011	2:33:54 AM	Helium MFC set to  0.000000
1/6/2011	2:33:54 AM	H2 MFC set to  500.000000
1/6/2011	2:33:54 AM	BCl3 MFC set to  0.000000
1/6/2011	2:33:54 AM	PHl3 MFC set to  0.000000
1/6/2011	2:33:54 AM	SiCl4 MFC set to  0.000000
1/6/2011	2:33:54 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	2:33:54 AM	Tube furnace set to 1000
1/6/2011	2:53:54 AM	Helium valve closed
1/6/2011	2:53:54 AM	PH3 valve closed
1/6/2011	2:53:54 AM	Main Vac valve closed
1/6/2011	2:53:54 AM	Bypass valve closed
1/6/2011	2:53:54 AM	H2 valve opened
1/6/2011	2:53:54 AM	BCl3 valve opened
1/6/2011	2:53:54 AM	SiCl4 pre valve opened
1/6/2011	2:53:54 AM	SiCl4 post valve opened
1/6/2011	2:53:54 AM	Bubbler valve opened
1/6/2011	2:53:54 AM	Helium MFC set to  0.000000
1/6/2011	2:53:54 AM	H2 MFC set to  500.000000
1/6/2011	2:53:54 AM	BCl3 MFC set to  1.500000
1/6/2011	2:53:54 AM	PHl3 MFC set to  0.000000
1/6/2011	2:53:54 AM	SiCl4 MFC set to  50.000000
1/6/2011	2:53:54 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	2:53:54 AM	Tube furnace set to 1000
1/6/2011	3:08:54 AM	H2 valve closed
1/6/2011	3:08:54 AM	BCl3 valve closed
1/6/2011	3:08:54 AM	PH3 valve closed
1/6/2011	3:08:54 AM	SiCl4 pre valve closed
1/6/2011	3:08:54 AM	SiCl4 post valve closed
1/6/2011	3:08:54 AM	Main Vac valve closed
1/6/2011	3:08:54 AM	Bypass valve closed
1/6/2011	3:08:54 AM	Helium valve opened
1/6/2011	3:08:54 AM	Bubbler valve opened
1/6/2011	3:08:54 AM	Helium MFC set to  500.000000
1/6/2011	3:08:54 AM	H2 MFC set to  0.000000
1/6/2011	3:08:54 AM	BCl3 MFC set to  0.000000
1/6/2011	3:08:54 AM	PHl3 MFC set to  0.000000
1/6/2011	3:08:54 AM	SiCl4 MFC set to  0.000000
1/6/2011	3:08:54 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:08:55 AM	Tube furnace set to 0
1/6/2011	3:28:55 AM	Helium valve closed
1/6/2011	3:28:55 AM	H2 valve closed
1/6/2011	3:28:55 AM	BCl3 valve closed
1/6/2011	3:28:55 AM	PH3 valve closed
1/6/2011	3:28:55 AM	SiCl4 pre valve closed
1/6/2011	3:28:55 AM	SiCl4 post valve closed
1/6/2011	3:28:55 AM	Main Vac valve closed
1/6/2011	3:28:55 AM	Bypass valve closed
1/6/2011	3:28:55 AM	Bubbler valve closed
1/6/2011	3:28:55 AM	Helium MFC set to  0.000000
1/6/2011	3:28:55 AM	H2 MFC set to  0.000000
1/6/2011	3:28:55 AM	BCl3 MFC set to  0.000000
1/6/2011	3:28:55 AM	PHl3 MFC set to  0.000000
1/6/2011	3:28:55 AM	SiCl4 MFC set to  0.000000
1/6/2011	3:28:55 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:28:55 AM	Tube furnace set to 0
1/6/2011	3:28:55 AM	Run finished at 3:28 AM
1/6/2011	4:21:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	4:21:48 AM	Recipe started at 4:21 AM
1/6/2011	4:21:48 AM	Helium valve closed
1/6/2011	4:21:48 AM	H2 valve closed
1/6/2011	4:21:48 AM	BCl3 valve closed
1/6/2011	4:21:48 AM	PH3 valve closed
1/6/2011	4:21:48 AM	SiCl4 pre valve closed
1/6/2011	4:21:48 AM	SiCl4 post valve closed
1/6/2011	4:21:48 AM	Main Vac valve closed
1/6/2011	4:21:48 AM	Bubbler valve closed
1/6/2011	4:21:48 AM	Bypass valve opened
1/6/2011	4:21:48 AM	Helium MFC set to  0.000000
1/6/2011	4:21:48 AM	H2 MFC set to  0.000000
1/6/2011	4:21:48 AM	BCl3 MFC set to  0.000000
1/6/2011	4:21:48 AM	PHl3 MFC set to  0.000000
1/6/2011	4:21:48 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:21:48 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:21:48 AM	Tube furnace set to 0
1/6/2011	4:22:50 AM	Helium valve closed
1/6/2011	4:22:50 AM	H2 valve closed
1/6/2011	4:22:50 AM	BCl3 valve closed
1/6/2011	4:22:50 AM	PH3 valve closed
1/6/2011	4:22:50 AM	SiCl4 pre valve closed
1/6/2011	4:22:50 AM	SiCl4 post valve closed
1/6/2011	4:22:50 AM	Bubbler valve closed
1/6/2011	4:22:50 AM	Main Vac valve opened
1/6/2011	4:22:50 AM	Bypass valve opened
1/6/2011	4:22:50 AM	Helium MFC set to  0.000000
1/6/2011	4:22:50 AM	H2 MFC set to  0.000000
1/6/2011	4:22:50 AM	BCl3 MFC set to  0.000000
1/6/2011	4:22:50 AM	PHl3 MFC set to  0.000000
1/6/2011	4:22:50 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:22:50 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:22:50 AM	Tube furnace set to 0
1/6/2011	4:22:50 AM	Run finished at 4:22 AM
1/6/2011	4:22:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	4:27:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	4:27:18 AM	Recipe started at 4:27 AM
1/6/2011	4:27:18 AM	Helium valve closed
1/6/2011	4:27:18 AM	H2 valve closed
1/6/2011	4:27:18 AM	BCl3 valve closed
1/6/2011	4:27:18 AM	PH3 valve closed
1/6/2011	4:27:18 AM	SiCl4 pre valve closed
1/6/2011	4:27:18 AM	SiCl4 post valve closed
1/6/2011	4:27:18 AM	Main Vac valve closed
1/6/2011	4:27:18 AM	Bubbler valve closed
1/6/2011	4:27:18 AM	Bypass valve opened
1/6/2011	4:27:19 AM	Helium MFC set to  0.000000
1/6/2011	4:27:19 AM	H2 MFC set to  0.000000
1/6/2011	4:27:19 AM	BCl3 MFC set to  0.000000
1/6/2011	4:27:19 AM	PHl3 MFC set to  0.000000
1/6/2011	4:27:19 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:27:19 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:27:19 AM	Tube furnace set to 0
1/6/2011	4:27:19 AM	Helium valve closed
1/6/2011	4:27:19 AM	H2 valve closed
1/6/2011	4:27:19 AM	BCl3 valve closed
1/6/2011	4:27:19 AM	PH3 valve closed
1/6/2011	4:27:19 AM	SiCl4 pre valve closed
1/6/2011	4:27:19 AM	SiCl4 post valve closed
1/6/2011	4:27:19 AM	Bubbler valve closed
1/6/2011	4:27:19 AM	Main Vac valve opened
1/6/2011	4:27:19 AM	Bypass valve opened
1/6/2011	4:27:19 AM	Helium MFC set to  0.000000
1/6/2011	4:27:19 AM	H2 MFC set to  0.000000
1/6/2011	4:27:19 AM	BCl3 MFC set to  0.000000
1/6/2011	4:27:19 AM	PHl3 MFC set to  0.000000
1/6/2011	4:27:19 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:27:19 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:27:19 AM	Tube furnace set to 0
1/6/2011	4:28:19 AM	H2 valve closed
1/6/2011	4:28:19 AM	BCl3 valve closed
1/6/2011	4:28:19 AM	PH3 valve closed
1/6/2011	4:28:19 AM	SiCl4 pre valve closed
1/6/2011	4:28:19 AM	SiCl4 post valve closed
1/6/2011	4:28:19 AM	Bubbler valve closed
1/6/2011	4:28:19 AM	Helium valve opened
1/6/2011	4:28:19 AM	Main Vac valve opened
1/6/2011	4:28:19 AM	Bypass valve opened
1/6/2011	4:28:19 AM	Helium MFC set to  100.000000
1/6/2011	4:28:19 AM	H2 MFC set to  0.000000
1/6/2011	4:28:19 AM	BCl3 MFC set to  0.000000
1/6/2011	4:28:19 AM	PHl3 MFC set to  0.000000
1/6/2011	4:28:19 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:28:19 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:28:19 AM	Tube furnace set to 0
1/6/2011	4:29:19 AM	Helium valve closed
1/6/2011	4:29:19 AM	H2 valve closed
1/6/2011	4:29:19 AM	BCl3 valve closed
1/6/2011	4:29:19 AM	PH3 valve closed
1/6/2011	4:29:19 AM	SiCl4 pre valve closed
1/6/2011	4:29:19 AM	SiCl4 post valve closed
1/6/2011	4:29:19 AM	Bubbler valve closed
1/6/2011	4:29:19 AM	Main Vac valve opened
1/6/2011	4:29:19 AM	Bypass valve opened
1/6/2011	4:29:19 AM	Helium MFC set to  0.000000
1/6/2011	4:29:19 AM	H2 MFC set to  0.000000
1/6/2011	4:29:19 AM	BCl3 MFC set to  0.000000
1/6/2011	4:29:19 AM	PHl3 MFC set to  0.000000
1/6/2011	4:29:19 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:29:19 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:29:20 AM	Tube furnace set to 0
1/6/2011	4:29:36 AM	Run aborted at 4:29 AM
1/6/2011	4:29:36 AM	Helium valve closed
1/6/2011	4:29:36 AM	H2 valve closed
1/6/2011	4:29:36 AM	BCl3 valve closed
1/6/2011	4:29:36 AM	PH3 valve closed
1/6/2011	4:29:36 AM	SiCl4 pre valve closed
1/6/2011	4:29:36 AM	SiCl4 post valve closed
1/6/2011	4:29:36 AM	Bypass valve closed
1/6/2011	4:29:36 AM	Main Vac valve closed
1/6/2011	4:29:36 AM	Bubbler valve closed
1/6/2011	4:29:36 AM	Helium MFC set to  0.000000
1/6/2011	4:29:36 AM	H2 MFC set to  0.000000
1/6/2011	4:29:36 AM	BCl3 MFC set to  0.000000
1/6/2011	4:29:36 AM	PHl3 MFC set to  0.000000
1/6/2011	4:29:36 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:29:36 AM	Tube furnace set to 0
1/6/2011	4:29:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	4:30:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	4:31:06 AM	Recipe started at 4:31 AM
1/6/2011	4:31:06 AM	Helium valve closed
1/6/2011	4:31:06 AM	H2 valve closed
1/6/2011	4:31:06 AM	BCl3 valve closed
1/6/2011	4:31:06 AM	PH3 valve closed
1/6/2011	4:31:06 AM	SiCl4 pre valve closed
1/6/2011	4:31:06 AM	SiCl4 post valve closed
1/6/2011	4:31:06 AM	Main Vac valve closed
1/6/2011	4:31:06 AM	Bubbler valve closed
1/6/2011	4:31:06 AM	Bypass valve opened
1/6/2011	4:31:06 AM	Helium MFC set to  0.000000
1/6/2011	4:31:06 AM	H2 MFC set to  0.000000
1/6/2011	4:31:06 AM	BCl3 MFC set to  0.000000
1/6/2011	4:31:06 AM	PHl3 MFC set to  0.000000
1/6/2011	4:31:06 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:31:06 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:31:06 AM	Tube furnace set to 0
1/6/2011	4:31:06 AM	Helium valve closed
1/6/2011	4:31:06 AM	H2 valve closed
1/6/2011	4:31:06 AM	BCl3 valve closed
1/6/2011	4:31:06 AM	PH3 valve closed
1/6/2011	4:31:06 AM	SiCl4 pre valve closed
1/6/2011	4:31:06 AM	SiCl4 post valve closed
1/6/2011	4:31:06 AM	Bubbler valve closed
1/6/2011	4:31:06 AM	Main Vac valve opened
1/6/2011	4:31:06 AM	Bypass valve opened
1/6/2011	4:31:06 AM	Helium MFC set to  0.000000
1/6/2011	4:31:06 AM	H2 MFC set to  0.000000
1/6/2011	4:31:06 AM	BCl3 MFC set to  0.000000
1/6/2011	4:31:06 AM	PHl3 MFC set to  0.000000
1/6/2011	4:31:06 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:31:06 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:31:06 AM	Tube furnace set to 0
1/6/2011	4:31:12 AM	H2 valve closed
1/6/2011	4:31:12 AM	BCl3 valve closed
1/6/2011	4:31:12 AM	PH3 valve closed
1/6/2011	4:31:12 AM	SiCl4 pre valve closed
1/6/2011	4:31:12 AM	SiCl4 post valve closed
1/6/2011	4:31:12 AM	Bubbler valve closed
1/6/2011	4:31:12 AM	Helium valve opened
1/6/2011	4:31:12 AM	Main Vac valve opened
1/6/2011	4:31:12 AM	Bypass valve opened
1/6/2011	4:31:12 AM	Helium MFC set to  100.000000
1/6/2011	4:31:12 AM	H2 MFC set to  0.000000
1/6/2011	4:31:12 AM	BCl3 MFC set to  0.000000
1/6/2011	4:31:12 AM	PHl3 MFC set to  0.000000
1/6/2011	4:31:12 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:31:12 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:31:12 AM	Tube furnace set to 0
1/6/2011	4:32:12 AM	Helium valve closed
1/6/2011	4:32:12 AM	H2 valve closed
1/6/2011	4:32:12 AM	BCl3 valve closed
1/6/2011	4:32:12 AM	PH3 valve closed
1/6/2011	4:32:12 AM	SiCl4 pre valve closed
1/6/2011	4:32:12 AM	SiCl4 post valve closed
1/6/2011	4:32:12 AM	Bubbler valve closed
1/6/2011	4:32:12 AM	Main Vac valve opened
1/6/2011	4:32:12 AM	Bypass valve opened
1/6/2011	4:32:12 AM	Helium MFC set to  0.000000
1/6/2011	4:32:12 AM	H2 MFC set to  0.000000
1/6/2011	4:32:12 AM	BCl3 MFC set to  0.000000
1/6/2011	4:32:12 AM	PHl3 MFC set to  0.000000
1/6/2011	4:32:12 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:32:12 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:32:12 AM	Tube furnace set to 0
1/6/2011	4:33:12 AM	H2 valve closed
1/6/2011	4:33:12 AM	BCl3 valve closed
1/6/2011	4:33:12 AM	PH3 valve closed
1/6/2011	4:33:12 AM	SiCl4 pre valve closed
1/6/2011	4:33:12 AM	SiCl4 post valve closed
1/6/2011	4:33:12 AM	Bubbler valve closed
1/6/2011	4:33:12 AM	Helium valve opened
1/6/2011	4:33:12 AM	Main Vac valve opened
1/6/2011	4:33:12 AM	Bypass valve opened
1/6/2011	4:33:12 AM	Helium MFC set to  100.000000
1/6/2011	4:33:12 AM	H2 MFC set to  0.000000
1/6/2011	4:33:12 AM	BCl3 MFC set to  0.000000
1/6/2011	4:33:12 AM	PHl3 MFC set to  0.000000
1/6/2011	4:33:12 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:33:12 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:33:13 AM	Tube furnace set to 0
1/6/2011	4:34:13 AM	Helium valve closed
1/6/2011	4:34:13 AM	H2 valve closed
1/6/2011	4:34:13 AM	BCl3 valve closed
1/6/2011	4:34:13 AM	PH3 valve closed
1/6/2011	4:34:13 AM	SiCl4 pre valve closed
1/6/2011	4:34:13 AM	SiCl4 post valve closed
1/6/2011	4:34:13 AM	Bubbler valve closed
1/6/2011	4:34:13 AM	Main Vac valve opened
1/6/2011	4:34:13 AM	Bypass valve opened
1/6/2011	4:34:13 AM	Helium MFC set to  0.000000
1/6/2011	4:34:13 AM	H2 MFC set to  0.000000
1/6/2011	4:34:13 AM	BCl3 MFC set to  0.000000
1/6/2011	4:34:13 AM	PHl3 MFC set to  0.000000
1/6/2011	4:34:13 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:34:13 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:34:13 AM	Tube furnace set to 0
1/6/2011	4:35:13 AM	H2 valve closed
1/6/2011	4:35:13 AM	BCl3 valve closed
1/6/2011	4:35:13 AM	PH3 valve closed
1/6/2011	4:35:13 AM	SiCl4 pre valve closed
1/6/2011	4:35:13 AM	SiCl4 post valve closed
1/6/2011	4:35:13 AM	Bubbler valve closed
1/6/2011	4:35:13 AM	Helium valve opened
1/6/2011	4:35:13 AM	Main Vac valve opened
1/6/2011	4:35:13 AM	Bypass valve opened
1/6/2011	4:35:13 AM	Helium MFC set to  100.000000
1/6/2011	4:35:13 AM	H2 MFC set to  0.000000
1/6/2011	4:35:13 AM	BCl3 MFC set to  0.000000
1/6/2011	4:35:13 AM	PHl3 MFC set to  0.000000
1/6/2011	4:35:13 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:35:13 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:35:13 AM	Tube furnace set to 0
1/6/2011	4:35:19 AM	Helium valve closed
1/6/2011	4:35:19 AM	H2 valve closed
1/6/2011	4:35:19 AM	BCl3 valve closed
1/6/2011	4:35:19 AM	PH3 valve closed
1/6/2011	4:35:19 AM	SiCl4 pre valve closed
1/6/2011	4:35:19 AM	SiCl4 post valve closed
1/6/2011	4:35:19 AM	Bubbler valve closed
1/6/2011	4:35:19 AM	Main Vac valve opened
1/6/2011	4:35:19 AM	Bypass valve opened
1/6/2011	4:35:19 AM	Helium MFC set to  0.000000
1/6/2011	4:35:19 AM	H2 MFC set to  0.000000
1/6/2011	4:35:19 AM	BCl3 MFC set to  0.000000
1/6/2011	4:35:19 AM	PHl3 MFC set to  0.000000
1/6/2011	4:35:19 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:35:19 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:35:19 AM	Tube furnace set to 0
1/6/2011	4:35:19 AM	H2 valve closed
1/6/2011	4:35:19 AM	BCl3 valve closed
1/6/2011	4:35:19 AM	PH3 valve closed
1/6/2011	4:35:19 AM	SiCl4 pre valve closed
1/6/2011	4:35:19 AM	SiCl4 post valve closed
1/6/2011	4:35:19 AM	Bubbler valve closed
1/6/2011	4:35:19 AM	Helium valve opened
1/6/2011	4:35:19 AM	Main Vac valve opened
1/6/2011	4:35:19 AM	Bypass valve opened
1/6/2011	4:35:19 AM	Helium MFC set to  100.000000
1/6/2011	4:35:19 AM	H2 MFC set to  0.000000
1/6/2011	4:35:19 AM	BCl3 MFC set to  0.000000
1/6/2011	4:35:19 AM	PHl3 MFC set to  0.000000
1/6/2011	4:35:19 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:35:19 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:35:19 AM	Tube furnace set to 0
1/6/2011	4:35:20 AM	Helium valve closed
1/6/2011	4:35:20 AM	H2 valve closed
1/6/2011	4:35:20 AM	BCl3 valve closed
1/6/2011	4:35:20 AM	PH3 valve closed
1/6/2011	4:35:20 AM	SiCl4 pre valve closed
1/6/2011	4:35:20 AM	SiCl4 post valve closed
1/6/2011	4:35:20 AM	Bubbler valve closed
1/6/2011	4:35:20 AM	Main Vac valve opened
1/6/2011	4:35:20 AM	Bypass valve opened
1/6/2011	4:35:20 AM	Helium MFC set to  0.000000
1/6/2011	4:35:20 AM	H2 MFC set to  0.000000
1/6/2011	4:35:20 AM	BCl3 MFC set to  0.000000
1/6/2011	4:35:20 AM	PHl3 MFC set to  0.000000
1/6/2011	4:35:20 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:35:20 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:35:20 AM	Tube furnace set to 0
1/6/2011	4:35:20 AM	H2 valve closed
1/6/2011	4:35:20 AM	BCl3 valve closed
1/6/2011	4:35:20 AM	PH3 valve closed
1/6/2011	4:35:20 AM	SiCl4 pre valve closed
1/6/2011	4:35:20 AM	SiCl4 post valve closed
1/6/2011	4:35:20 AM	Bubbler valve closed
1/6/2011	4:35:20 AM	Helium valve opened
1/6/2011	4:35:20 AM	Main Vac valve opened
1/6/2011	4:35:20 AM	Bypass valve opened
1/6/2011	4:35:20 AM	Helium MFC set to  100.000000
1/6/2011	4:35:20 AM	H2 MFC set to  0.000000
1/6/2011	4:35:20 AM	BCl3 MFC set to  0.000000
1/6/2011	4:35:20 AM	PHl3 MFC set to  0.000000
1/6/2011	4:35:20 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:35:20 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:35:20 AM	Tube furnace set to 0
1/6/2011	4:35:21 AM	Helium valve closed
1/6/2011	4:35:21 AM	H2 valve closed
1/6/2011	4:35:21 AM	BCl3 valve closed
1/6/2011	4:35:21 AM	PH3 valve closed
1/6/2011	4:35:21 AM	SiCl4 pre valve closed
1/6/2011	4:35:21 AM	SiCl4 post valve closed
1/6/2011	4:35:21 AM	Bubbler valve closed
1/6/2011	4:35:21 AM	Main Vac valve opened
1/6/2011	4:35:21 AM	Bypass valve opened
1/6/2011	4:35:21 AM	Helium MFC set to  0.000000
1/6/2011	4:35:21 AM	H2 MFC set to  0.000000
1/6/2011	4:35:21 AM	BCl3 MFC set to  0.000000
1/6/2011	4:35:21 AM	PHl3 MFC set to  0.000000
1/6/2011	4:35:21 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:35:21 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:35:21 AM	Tube furnace set to 0
1/6/2011	4:35:22 AM	H2 valve closed
1/6/2011	4:35:22 AM	BCl3 valve closed
1/6/2011	4:35:22 AM	PH3 valve closed
1/6/2011	4:35:22 AM	SiCl4 pre valve closed
1/6/2011	4:35:22 AM	SiCl4 post valve closed
1/6/2011	4:35:22 AM	Bubbler valve closed
1/6/2011	4:35:22 AM	Helium valve opened
1/6/2011	4:35:22 AM	Main Vac valve opened
1/6/2011	4:35:22 AM	Bypass valve opened
1/6/2011	4:35:22 AM	Helium MFC set to  100.000000
1/6/2011	4:35:22 AM	H2 MFC set to  0.000000
1/6/2011	4:35:22 AM	BCl3 MFC set to  0.000000
1/6/2011	4:35:22 AM	PHl3 MFC set to  0.000000
1/6/2011	4:35:22 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:35:22 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:35:22 AM	Tube furnace set to 0
1/6/2011	4:36:22 AM	Helium valve closed
1/6/2011	4:36:22 AM	H2 valve closed
1/6/2011	4:36:22 AM	BCl3 valve closed
1/6/2011	4:36:22 AM	PH3 valve closed
1/6/2011	4:36:22 AM	SiCl4 pre valve closed
1/6/2011	4:36:22 AM	SiCl4 post valve closed
1/6/2011	4:36:22 AM	Bubbler valve closed
1/6/2011	4:36:22 AM	Main Vac valve opened
1/6/2011	4:36:22 AM	Bypass valve opened
1/6/2011	4:36:22 AM	Helium MFC set to  0.000000
1/6/2011	4:36:22 AM	H2 MFC set to  0.000000
1/6/2011	4:36:22 AM	BCl3 MFC set to  0.000000
1/6/2011	4:36:22 AM	PHl3 MFC set to  0.000000
1/6/2011	4:36:22 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:36:22 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:36:22 AM	Tube furnace set to 0
1/6/2011	4:36:25 AM	Run aborted at 4:36 AM
1/6/2011	4:36:25 AM	Helium valve closed
1/6/2011	4:36:25 AM	H2 valve closed
1/6/2011	4:36:25 AM	BCl3 valve closed
1/6/2011	4:36:25 AM	PH3 valve closed
1/6/2011	4:36:25 AM	SiCl4 pre valve closed
1/6/2011	4:36:25 AM	SiCl4 post valve closed
1/6/2011	4:36:25 AM	Bypass valve closed
1/6/2011	4:36:25 AM	Main Vac valve closed
1/6/2011	4:36:25 AM	Bubbler valve closed
1/6/2011	4:36:25 AM	Helium MFC set to  0.000000
1/6/2011	4:36:25 AM	H2 MFC set to  0.000000
1/6/2011	4:36:25 AM	BCl3 MFC set to  0.000000
1/6/2011	4:36:25 AM	PHl3 MFC set to  0.000000
1/6/2011	4:36:25 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:36:25 AM	Tube furnace set to 0
1/6/2011	4:36:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	4:36:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	4:36:47 AM	Recipe started at 4:36 AM
1/6/2011	4:36:47 AM	Helium valve closed
1/6/2011	4:36:47 AM	H2 valve closed
1/6/2011	4:36:47 AM	BCl3 valve closed
1/6/2011	4:36:47 AM	PH3 valve closed
1/6/2011	4:36:47 AM	SiCl4 pre valve closed
1/6/2011	4:36:47 AM	SiCl4 post valve closed
1/6/2011	4:36:47 AM	Main Vac valve closed
1/6/2011	4:36:47 AM	Bubbler valve closed
1/6/2011	4:36:47 AM	Bypass valve opened
1/6/2011	4:36:47 AM	Helium MFC set to  0.000000
1/6/2011	4:36:47 AM	H2 MFC set to  0.000000
1/6/2011	4:36:47 AM	BCl3 MFC set to  0.000000
1/6/2011	4:36:47 AM	PHl3 MFC set to  0.000000
1/6/2011	4:36:47 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:36:47 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:36:47 AM	Tube furnace set to 0
1/6/2011	4:36:47 AM	Helium valve closed
1/6/2011	4:36:47 AM	H2 valve closed
1/6/2011	4:36:47 AM	BCl3 valve closed
1/6/2011	4:36:47 AM	PH3 valve closed
1/6/2011	4:36:47 AM	SiCl4 pre valve closed
1/6/2011	4:36:47 AM	SiCl4 post valve closed
1/6/2011	4:36:47 AM	Bubbler valve closed
1/6/2011	4:36:47 AM	Main Vac valve opened
1/6/2011	4:36:47 AM	Bypass valve opened
1/6/2011	4:36:47 AM	Helium MFC set to  0.000000
1/6/2011	4:36:47 AM	H2 MFC set to  0.000000
1/6/2011	4:36:47 AM	BCl3 MFC set to  0.000000
1/6/2011	4:36:47 AM	PHl3 MFC set to  0.000000
1/6/2011	4:36:47 AM	SiCl4 MFC set to  0.000000
1/6/2011	4:36:47 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	4:36:47 AM	Tube furnace set to 0
1/6/2011	4:36:47 AM	Run finished at 4:36 AM
1/6/2011	4:36:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	7:15:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/6/2011	7:15:22 AM	Recipe started at 7:15 AM
1/6/2011	7:15:22 AM	Helium valve closed
1/6/2011	7:15:22 AM	H2 valve closed
1/6/2011	7:15:22 AM	BCl3 valve closed
1/6/2011	7:15:22 AM	PH3 valve closed
1/6/2011	7:15:22 AM	SiCl4 pre valve closed
1/6/2011	7:15:22 AM	SiCl4 post valve closed
1/6/2011	7:15:22 AM	Main Vac valve closed
1/6/2011	7:15:22 AM	Bypass valve closed
1/6/2011	7:15:22 AM	Bubbler valve closed
1/6/2011	7:15:22 AM	Helium MFC set to  0.000000
1/6/2011	7:15:22 AM	H2 MFC set to  0.000000
1/6/2011	7:15:22 AM	BCl3 MFC set to  0.000000
1/6/2011	7:15:22 AM	PHl3 MFC set to  0.000000
1/6/2011	7:15:22 AM	SiCl4 MFC set to  0.000000
1/6/2011	7:15:22 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:15:23 AM	Tube furnace set to 0
1/6/2011	7:15:23 AM	Run finished at 7:15 AM
1/6/2011	7:15:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/6/2011	7:15:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	7:15:44 AM	Recipe started at 7:15 AM
1/6/2011	7:15:44 AM	Helium valve closed
1/6/2011	7:15:44 AM	H2 valve closed
1/6/2011	7:15:44 AM	BCl3 valve closed
1/6/2011	7:15:44 AM	PH3 valve closed
1/6/2011	7:15:44 AM	SiCl4 pre valve closed
1/6/2011	7:15:44 AM	SiCl4 post valve closed
1/6/2011	7:15:44 AM	Main Vac valve closed
1/6/2011	7:15:44 AM	Bubbler valve closed
1/6/2011	7:15:44 AM	Bypass valve opened
1/6/2011	7:15:44 AM	Helium MFC set to  0.000000
1/6/2011	7:15:44 AM	H2 MFC set to  0.000000
1/6/2011	7:15:44 AM	BCl3 MFC set to  0.000000
1/6/2011	7:15:44 AM	PHl3 MFC set to  0.000000
1/6/2011	7:15:44 AM	SiCl4 MFC set to  0.000000
1/6/2011	7:15:44 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:15:44 AM	Tube furnace set to 0
1/6/2011	7:15:45 AM	Helium valve closed
1/6/2011	7:15:45 AM	H2 valve closed
1/6/2011	7:15:45 AM	BCl3 valve closed
1/6/2011	7:15:45 AM	PH3 valve closed
1/6/2011	7:15:45 AM	SiCl4 pre valve closed
1/6/2011	7:15:45 AM	SiCl4 post valve closed
1/6/2011	7:15:45 AM	Bubbler valve closed
1/6/2011	7:15:45 AM	Main Vac valve opened
1/6/2011	7:15:45 AM	Bypass valve opened
1/6/2011	7:15:45 AM	Helium MFC set to  0.000000
1/6/2011	7:15:45 AM	H2 MFC set to  0.000000
1/6/2011	7:15:45 AM	BCl3 MFC set to  0.000000
1/6/2011	7:15:45 AM	PHl3 MFC set to  0.000000
1/6/2011	7:15:45 AM	SiCl4 MFC set to  0.000000
1/6/2011	7:15:45 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:15:45 AM	Tube furnace set to 0
1/6/2011	7:15:45 AM	Run finished at 7:15 AM
1/6/2011	7:15:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	7:16:33 AM	Recipe started at 7:16 AM
1/6/2011	7:16:33 AM	Helium valve closed
1/6/2011	7:16:33 AM	BCl3 valve closed
1/6/2011	7:16:33 AM	PH3 valve closed
1/6/2011	7:16:33 AM	SiCl4 pre valve closed
1/6/2011	7:16:33 AM	SiCl4 post valve closed
1/6/2011	7:16:33 AM	Main Vac valve closed
1/6/2011	7:16:33 AM	Bypass valve closed
1/6/2011	7:16:33 AM	Bubbler valve closed
1/6/2011	7:16:33 AM	H2 valve opened
1/6/2011	7:16:33 AM	Helium MFC set to  0.000000
1/6/2011	7:16:33 AM	H2 MFC set to  500.000000
1/6/2011	7:16:33 AM	BCl3 MFC set to  0.000000
1/6/2011	7:16:33 AM	PHl3 MFC set to  0.000000
1/6/2011	7:16:33 AM	SiCl4 MFC set to  0.000000
1/6/2011	7:16:33 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:16:33 AM	Tube furnace set to 0
1/6/2011	7:17:56 AM	Helium valve closed
1/6/2011	7:17:56 AM	BCl3 valve closed
1/6/2011	7:17:56 AM	PH3 valve closed
1/6/2011	7:17:56 AM	SiCl4 pre valve closed
1/6/2011	7:17:56 AM	SiCl4 post valve closed
1/6/2011	7:17:56 AM	Main Vac valve closed
1/6/2011	7:17:56 AM	Bypass valve closed
1/6/2011	7:17:56 AM	H2 valve opened
1/6/2011	7:17:56 AM	Bubbler valve opened
1/6/2011	7:17:56 AM	Helium MFC set to  0.000000
1/6/2011	7:17:56 AM	H2 MFC set to  500.000000
1/6/2011	7:17:56 AM	BCl3 MFC set to  0.000000
1/6/2011	7:17:56 AM	PHl3 MFC set to  0.000000
1/6/2011	7:17:56 AM	SiCl4 MFC set to  0.000000
1/6/2011	7:17:56 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:17:56 AM	Tube furnace set to 1000
1/6/2011	7:37:56 AM	Helium valve closed
1/6/2011	7:37:56 AM	PH3 valve closed
1/6/2011	7:37:56 AM	Main Vac valve closed
1/6/2011	7:37:56 AM	Bypass valve closed
1/6/2011	7:37:56 AM	H2 valve opened
1/6/2011	7:37:56 AM	BCl3 valve opened
1/6/2011	7:37:56 AM	SiCl4 pre valve opened
1/6/2011	7:37:56 AM	SiCl4 post valve opened
1/6/2011	7:37:56 AM	Bubbler valve opened
1/6/2011	7:37:56 AM	Helium MFC set to  0.000000
1/6/2011	7:37:56 AM	H2 MFC set to  500.000000
1/6/2011	7:37:56 AM	BCl3 MFC set to  1.500000
1/6/2011	7:37:56 AM	PHl3 MFC set to  0.000000
1/6/2011	7:37:56 AM	SiCl4 MFC set to  50.000000
1/6/2011	7:37:56 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:37:56 AM	Tube furnace set to 1000
1/6/2011	7:52:56 AM	H2 valve closed
1/6/2011	7:52:56 AM	BCl3 valve closed
1/6/2011	7:52:56 AM	PH3 valve closed
1/6/2011	7:52:56 AM	SiCl4 pre valve closed
1/6/2011	7:52:56 AM	SiCl4 post valve closed
1/6/2011	7:52:56 AM	Main Vac valve closed
1/6/2011	7:52:56 AM	Bypass valve closed
1/6/2011	7:52:56 AM	Helium valve opened
1/6/2011	7:52:56 AM	Bubbler valve opened
1/6/2011	7:52:56 AM	Helium MFC set to  500.000000
1/6/2011	7:52:56 AM	H2 MFC set to  0.000000
1/6/2011	7:52:56 AM	BCl3 MFC set to  0.000000
1/6/2011	7:52:56 AM	PHl3 MFC set to  0.000000
1/6/2011	7:52:56 AM	SiCl4 MFC set to  0.000000
1/6/2011	7:52:56 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:52:56 AM	Tube furnace set to 0
1/6/2011	8:12:56 AM	Helium valve closed
1/6/2011	8:12:56 AM	H2 valve closed
1/6/2011	8:12:56 AM	BCl3 valve closed
1/6/2011	8:12:56 AM	PH3 valve closed
1/6/2011	8:12:56 AM	SiCl4 pre valve closed
1/6/2011	8:12:56 AM	SiCl4 post valve closed
1/6/2011	8:12:56 AM	Main Vac valve closed
1/6/2011	8:12:56 AM	Bypass valve closed
1/6/2011	8:12:56 AM	Bubbler valve closed
1/6/2011	8:12:56 AM	Helium MFC set to  0.000000
1/6/2011	8:12:56 AM	H2 MFC set to  0.000000
1/6/2011	8:12:56 AM	BCl3 MFC set to  0.000000
1/6/2011	8:12:56 AM	PHl3 MFC set to  0.000000
1/6/2011	8:12:56 AM	SiCl4 MFC set to  0.000000
1/6/2011	8:12:56 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	8:12:56 AM	Tube furnace set to 0
1/6/2011	8:12:57 AM	Run finished at 8:12 AM
1/6/2011	8:52:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	8:52:07 AM	Recipe started at 8:52 AM
1/6/2011	8:52:07 AM	Helium valve closed
1/6/2011	8:52:07 AM	H2 valve closed
1/6/2011	8:52:07 AM	BCl3 valve closed
1/6/2011	8:52:07 AM	PH3 valve closed
1/6/2011	8:52:07 AM	SiCl4 pre valve closed
1/6/2011	8:52:07 AM	SiCl4 post valve closed
1/6/2011	8:52:07 AM	Main Vac valve closed
1/6/2011	8:52:07 AM	Bubbler valve closed
1/6/2011	8:52:07 AM	Bypass valve opened
1/6/2011	8:52:07 AM	Helium MFC set to  0.000000
1/6/2011	8:52:07 AM	H2 MFC set to  0.000000
1/6/2011	8:52:07 AM	BCl3 MFC set to  0.000000
1/6/2011	8:52:07 AM	PHl3 MFC set to  0.000000
1/6/2011	8:52:07 AM	SiCl4 MFC set to  0.000000
1/6/2011	8:52:07 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	8:52:07 AM	Tube furnace set to 0
1/6/2011	8:53:10 AM	Helium valve closed
1/6/2011	8:53:10 AM	H2 valve closed
1/6/2011	8:53:10 AM	BCl3 valve closed
1/6/2011	8:53:10 AM	PH3 valve closed
1/6/2011	8:53:10 AM	SiCl4 pre valve closed
1/6/2011	8:53:10 AM	SiCl4 post valve closed
1/6/2011	8:53:10 AM	Bubbler valve closed
1/6/2011	8:53:10 AM	Main Vac valve opened
1/6/2011	8:53:10 AM	Bypass valve opened
1/6/2011	8:53:10 AM	Helium MFC set to  0.000000
1/6/2011	8:53:10 AM	H2 MFC set to  0.000000
1/6/2011	8:53:10 AM	BCl3 MFC set to  0.000000
1/6/2011	8:53:10 AM	PHl3 MFC set to  0.000000
1/6/2011	8:53:10 AM	SiCl4 MFC set to  0.000000
1/6/2011	8:53:10 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	8:53:11 AM	Tube furnace set to 0
1/6/2011	8:53:11 AM	Run finished at 8:53 AM
1/6/2011	8:53:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	8:54:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/6/2011	8:54:41 AM	Recipe started at 8:54 AM
1/6/2011	8:54:41 AM	H2 valve closed
1/6/2011	8:54:41 AM	BCl3 valve closed
1/6/2011	8:54:41 AM	PH3 valve closed
1/6/2011	8:54:41 AM	SiCl4 pre valve closed
1/6/2011	8:54:41 AM	SiCl4 post valve closed
1/6/2011	8:54:41 AM	Main Vac valve closed
1/6/2011	8:54:41 AM	Bypass valve closed
1/6/2011	8:54:41 AM	Bubbler valve closed
1/6/2011	8:54:41 AM	Helium valve opened
1/6/2011	8:54:41 AM	Helium MFC set to  500.000000
1/6/2011	8:54:41 AM	H2 MFC set to  0.000000
1/6/2011	8:54:41 AM	BCl3 MFC set to  0.000000
1/6/2011	8:54:41 AM	PHl3 MFC set to  0.000000
1/6/2011	8:54:41 AM	SiCl4 MFC set to  0.000000
1/6/2011	8:54:41 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	8:54:41 AM	Tube furnace set to 0
1/6/2011	8:56:00 AM	Helium valve closed
1/6/2011	8:56:00 AM	H2 valve closed
1/6/2011	8:56:00 AM	BCl3 valve closed
1/6/2011	8:56:00 AM	PH3 valve closed
1/6/2011	8:56:00 AM	SiCl4 pre valve closed
1/6/2011	8:56:00 AM	SiCl4 post valve closed
1/6/2011	8:56:00 AM	Main Vac valve closed
1/6/2011	8:56:00 AM	Bypass valve closed
1/6/2011	8:56:00 AM	Bubbler valve closed
1/6/2011	8:56:00 AM	Helium MFC set to  0.000000
1/6/2011	8:56:00 AM	H2 MFC set to  0.000000
1/6/2011	8:56:00 AM	BCl3 MFC set to  0.000000
1/6/2011	8:56:00 AM	PHl3 MFC set to  0.000000
1/6/2011	8:56:00 AM	SiCl4 MFC set to  0.000000
1/6/2011	8:56:00 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	8:56:00 AM	Tube furnace set to 0
1/6/2011	8:56:00 AM	Run finished at 8:56 AM
1/6/2011	8:56:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/6/2011	9:05:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	9:05:11 AM	Recipe started at 9:05 AM
1/6/2011	9:05:11 AM	Helium valve closed
1/6/2011	9:05:11 AM	H2 valve closed
1/6/2011	9:05:11 AM	BCl3 valve closed
1/6/2011	9:05:11 AM	PH3 valve closed
1/6/2011	9:05:11 AM	SiCl4 pre valve closed
1/6/2011	9:05:11 AM	SiCl4 post valve closed
1/6/2011	9:05:11 AM	Main Vac valve closed
1/6/2011	9:05:11 AM	Bubbler valve closed
1/6/2011	9:05:11 AM	Bypass valve opened
1/6/2011	9:05:11 AM	Helium MFC set to  0.000000
1/6/2011	9:05:11 AM	H2 MFC set to  0.000000
1/6/2011	9:05:11 AM	BCl3 MFC set to  0.000000
1/6/2011	9:05:11 AM	PHl3 MFC set to  0.000000
1/6/2011	9:05:11 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:05:11 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:05:11 AM	Tube furnace set to 0
1/6/2011	9:06:11 AM	Helium valve closed
1/6/2011	9:06:11 AM	H2 valve closed
1/6/2011	9:06:11 AM	BCl3 valve closed
1/6/2011	9:06:11 AM	PH3 valve closed
1/6/2011	9:06:11 AM	SiCl4 pre valve closed
1/6/2011	9:06:11 AM	SiCl4 post valve closed
1/6/2011	9:06:11 AM	Bubbler valve closed
1/6/2011	9:06:11 AM	Main Vac valve opened
1/6/2011	9:06:11 AM	Bypass valve opened
1/6/2011	9:06:11 AM	Helium MFC set to  0.000000
1/6/2011	9:06:11 AM	H2 MFC set to  0.000000
1/6/2011	9:06:11 AM	BCl3 MFC set to  0.000000
1/6/2011	9:06:11 AM	PHl3 MFC set to  0.000000
1/6/2011	9:06:11 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:06:11 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:06:11 AM	Tube furnace set to 0
1/6/2011	9:06:11 AM	Run finished at 9:06 AM
1/6/2011	9:06:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	9:13:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	9:13:50 AM	Recipe started at 9:13 AM
1/6/2011	9:13:50 AM	Helium valve closed
1/6/2011	9:13:50 AM	H2 valve closed
1/6/2011	9:13:50 AM	BCl3 valve closed
1/6/2011	9:13:50 AM	PH3 valve closed
1/6/2011	9:13:50 AM	SiCl4 pre valve closed
1/6/2011	9:13:50 AM	SiCl4 post valve closed
1/6/2011	9:13:50 AM	Main Vac valve closed
1/6/2011	9:13:50 AM	Bubbler valve closed
1/6/2011	9:13:50 AM	Bypass valve opened
1/6/2011	9:13:50 AM	Helium MFC set to  0.000000
1/6/2011	9:13:50 AM	H2 MFC set to  0.000000
1/6/2011	9:13:50 AM	BCl3 MFC set to  0.000000
1/6/2011	9:13:50 AM	PHl3 MFC set to  0.000000
1/6/2011	9:13:50 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:13:50 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:13:50 AM	Tube furnace set to 0
1/6/2011	9:13:50 AM	Helium valve closed
1/6/2011	9:13:50 AM	H2 valve closed
1/6/2011	9:13:50 AM	BCl3 valve closed
1/6/2011	9:13:50 AM	PH3 valve closed
1/6/2011	9:13:50 AM	SiCl4 pre valve closed
1/6/2011	9:13:50 AM	SiCl4 post valve closed
1/6/2011	9:13:50 AM	Bubbler valve closed
1/6/2011	9:13:50 AM	Main Vac valve opened
1/6/2011	9:13:50 AM	Bypass valve opened
1/6/2011	9:13:50 AM	Helium MFC set to  0.000000
1/6/2011	9:13:50 AM	H2 MFC set to  0.000000
1/6/2011	9:13:50 AM	BCl3 MFC set to  0.000000
1/6/2011	9:13:50 AM	PHl3 MFC set to  0.000000
1/6/2011	9:13:50 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:13:50 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:13:51 AM	Tube furnace set to 0
1/6/2011	9:14:51 AM	H2 valve closed
1/6/2011	9:14:51 AM	BCl3 valve closed
1/6/2011	9:14:51 AM	PH3 valve closed
1/6/2011	9:14:51 AM	SiCl4 pre valve closed
1/6/2011	9:14:51 AM	SiCl4 post valve closed
1/6/2011	9:14:51 AM	Bubbler valve closed
1/6/2011	9:14:51 AM	Helium valve opened
1/6/2011	9:14:51 AM	Main Vac valve opened
1/6/2011	9:14:51 AM	Bypass valve opened
1/6/2011	9:14:51 AM	Helium MFC set to  100.000000
1/6/2011	9:14:51 AM	H2 MFC set to  0.000000
1/6/2011	9:14:51 AM	BCl3 MFC set to  0.000000
1/6/2011	9:14:51 AM	PHl3 MFC set to  0.000000
1/6/2011	9:14:51 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:14:51 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:14:51 AM	Tube furnace set to 0
1/6/2011	9:15:51 AM	Helium valve closed
1/6/2011	9:15:51 AM	H2 valve closed
1/6/2011	9:15:51 AM	BCl3 valve closed
1/6/2011	9:15:51 AM	PH3 valve closed
1/6/2011	9:15:51 AM	SiCl4 pre valve closed
1/6/2011	9:15:51 AM	SiCl4 post valve closed
1/6/2011	9:15:51 AM	Bubbler valve closed
1/6/2011	9:15:51 AM	Main Vac valve opened
1/6/2011	9:15:51 AM	Bypass valve opened
1/6/2011	9:15:51 AM	Helium MFC set to  0.000000
1/6/2011	9:15:51 AM	H2 MFC set to  0.000000
1/6/2011	9:15:51 AM	BCl3 MFC set to  0.000000
1/6/2011	9:15:51 AM	PHl3 MFC set to  0.000000
1/6/2011	9:15:51 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:15:51 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:15:51 AM	Tube furnace set to 0
1/6/2011	9:16:51 AM	H2 valve closed
1/6/2011	9:16:51 AM	BCl3 valve closed
1/6/2011	9:16:51 AM	PH3 valve closed
1/6/2011	9:16:51 AM	SiCl4 pre valve closed
1/6/2011	9:16:51 AM	SiCl4 post valve closed
1/6/2011	9:16:51 AM	Bubbler valve closed
1/6/2011	9:16:51 AM	Helium valve opened
1/6/2011	9:16:51 AM	Main Vac valve opened
1/6/2011	9:16:51 AM	Bypass valve opened
1/6/2011	9:16:51 AM	Helium MFC set to  100.000000
1/6/2011	9:16:51 AM	H2 MFC set to  0.000000
1/6/2011	9:16:51 AM	BCl3 MFC set to  0.000000
1/6/2011	9:16:51 AM	PHl3 MFC set to  0.000000
1/6/2011	9:16:51 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:16:51 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:16:51 AM	Tube furnace set to 0
1/6/2011	9:17:51 AM	Helium valve closed
1/6/2011	9:17:51 AM	H2 valve closed
1/6/2011	9:17:51 AM	BCl3 valve closed
1/6/2011	9:17:51 AM	PH3 valve closed
1/6/2011	9:17:51 AM	SiCl4 pre valve closed
1/6/2011	9:17:51 AM	SiCl4 post valve closed
1/6/2011	9:17:51 AM	Bubbler valve closed
1/6/2011	9:17:51 AM	Main Vac valve opened
1/6/2011	9:17:51 AM	Bypass valve opened
1/6/2011	9:17:51 AM	Helium MFC set to  0.000000
1/6/2011	9:17:51 AM	H2 MFC set to  0.000000
1/6/2011	9:17:51 AM	BCl3 MFC set to  0.000000
1/6/2011	9:17:51 AM	PHl3 MFC set to  0.000000
1/6/2011	9:17:51 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:17:51 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:17:51 AM	Tube furnace set to 0
1/6/2011	9:18:51 AM	H2 valve closed
1/6/2011	9:18:51 AM	BCl3 valve closed
1/6/2011	9:18:51 AM	PH3 valve closed
1/6/2011	9:18:51 AM	SiCl4 pre valve closed
1/6/2011	9:18:51 AM	SiCl4 post valve closed
1/6/2011	9:18:51 AM	Bubbler valve closed
1/6/2011	9:18:51 AM	Helium valve opened
1/6/2011	9:18:51 AM	Main Vac valve opened
1/6/2011	9:18:51 AM	Bypass valve opened
1/6/2011	9:18:51 AM	Helium MFC set to  100.000000
1/6/2011	9:18:51 AM	H2 MFC set to  0.000000
1/6/2011	9:18:51 AM	BCl3 MFC set to  0.000000
1/6/2011	9:18:51 AM	PHl3 MFC set to  0.000000
1/6/2011	9:18:51 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:18:51 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:18:52 AM	Tube furnace set to 0
1/6/2011	9:19:52 AM	Helium valve closed
1/6/2011	9:19:52 AM	H2 valve closed
1/6/2011	9:19:52 AM	BCl3 valve closed
1/6/2011	9:19:52 AM	PH3 valve closed
1/6/2011	9:19:52 AM	SiCl4 pre valve closed
1/6/2011	9:19:52 AM	SiCl4 post valve closed
1/6/2011	9:19:52 AM	Bubbler valve closed
1/6/2011	9:19:52 AM	Main Vac valve opened
1/6/2011	9:19:52 AM	Bypass valve opened
1/6/2011	9:19:52 AM	Helium MFC set to  0.000000
1/6/2011	9:19:52 AM	H2 MFC set to  0.000000
1/6/2011	9:19:52 AM	BCl3 MFC set to  0.000000
1/6/2011	9:19:52 AM	PHl3 MFC set to  0.000000
1/6/2011	9:19:52 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:19:52 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:19:52 AM	Tube furnace set to 0
1/6/2011	9:20:52 AM	H2 valve closed
1/6/2011	9:20:52 AM	BCl3 valve closed
1/6/2011	9:20:52 AM	PH3 valve closed
1/6/2011	9:20:52 AM	SiCl4 pre valve closed
1/6/2011	9:20:52 AM	SiCl4 post valve closed
1/6/2011	9:20:52 AM	Bubbler valve closed
1/6/2011	9:20:52 AM	Helium valve opened
1/6/2011	9:20:52 AM	Main Vac valve opened
1/6/2011	9:20:52 AM	Bypass valve opened
1/6/2011	9:20:52 AM	Helium MFC set to  100.000000
1/6/2011	9:20:52 AM	H2 MFC set to  0.000000
1/6/2011	9:20:52 AM	BCl3 MFC set to  0.000000
1/6/2011	9:20:52 AM	PHl3 MFC set to  0.000000
1/6/2011	9:20:52 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:20:52 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:20:52 AM	Tube furnace set to 0
1/6/2011	9:21:52 AM	Helium valve closed
1/6/2011	9:21:52 AM	H2 valve closed
1/6/2011	9:21:52 AM	BCl3 valve closed
1/6/2011	9:21:52 AM	PH3 valve closed
1/6/2011	9:21:52 AM	SiCl4 pre valve closed
1/6/2011	9:21:52 AM	SiCl4 post valve closed
1/6/2011	9:21:52 AM	Bubbler valve closed
1/6/2011	9:21:52 AM	Main Vac valve opened
1/6/2011	9:21:52 AM	Bypass valve opened
1/6/2011	9:21:52 AM	Helium MFC set to  0.000000
1/6/2011	9:21:52 AM	H2 MFC set to  0.000000
1/6/2011	9:21:52 AM	BCl3 MFC set to  0.000000
1/6/2011	9:21:52 AM	PHl3 MFC set to  0.000000
1/6/2011	9:21:52 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:21:52 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:21:52 AM	Tube furnace set to 0
1/6/2011	9:22:52 AM	H2 valve closed
1/6/2011	9:22:52 AM	BCl3 valve closed
1/6/2011	9:22:52 AM	PH3 valve closed
1/6/2011	9:22:52 AM	SiCl4 pre valve closed
1/6/2011	9:22:52 AM	SiCl4 post valve closed
1/6/2011	9:22:52 AM	Bubbler valve closed
1/6/2011	9:22:52 AM	Helium valve opened
1/6/2011	9:22:52 AM	Main Vac valve opened
1/6/2011	9:22:52 AM	Bypass valve opened
1/6/2011	9:22:52 AM	Helium MFC set to  100.000000
1/6/2011	9:22:52 AM	H2 MFC set to  0.000000
1/6/2011	9:22:52 AM	BCl3 MFC set to  0.000000
1/6/2011	9:22:52 AM	PHl3 MFC set to  0.000000
1/6/2011	9:22:52 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:22:52 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:22:52 AM	Tube furnace set to 0
1/6/2011	9:23:52 AM	Helium valve closed
1/6/2011	9:23:52 AM	H2 valve closed
1/6/2011	9:23:52 AM	BCl3 valve closed
1/6/2011	9:23:52 AM	PH3 valve closed
1/6/2011	9:23:52 AM	SiCl4 pre valve closed
1/6/2011	9:23:52 AM	SiCl4 post valve closed
1/6/2011	9:23:52 AM	Bubbler valve closed
1/6/2011	9:23:52 AM	Main Vac valve opened
1/6/2011	9:23:52 AM	Bypass valve opened
1/6/2011	9:23:52 AM	Helium MFC set to  0.000000
1/6/2011	9:23:52 AM	H2 MFC set to  0.000000
1/6/2011	9:23:52 AM	BCl3 MFC set to  0.000000
1/6/2011	9:23:52 AM	PHl3 MFC set to  0.000000
1/6/2011	9:23:52 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:23:52 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:23:53 AM	Tube furnace set to 0
1/6/2011	9:24:53 AM	H2 valve closed
1/6/2011	9:24:53 AM	BCl3 valve closed
1/6/2011	9:24:53 AM	PH3 valve closed
1/6/2011	9:24:53 AM	SiCl4 pre valve closed
1/6/2011	9:24:53 AM	SiCl4 post valve closed
1/6/2011	9:24:53 AM	Bubbler valve closed
1/6/2011	9:24:53 AM	Helium valve opened
1/6/2011	9:24:53 AM	Main Vac valve opened
1/6/2011	9:24:53 AM	Bypass valve opened
1/6/2011	9:24:53 AM	Helium MFC set to  100.000000
1/6/2011	9:24:53 AM	H2 MFC set to  0.000000
1/6/2011	9:24:53 AM	BCl3 MFC set to  0.000000
1/6/2011	9:24:53 AM	PHl3 MFC set to  0.000000
1/6/2011	9:24:53 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:24:53 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:24:53 AM	Tube furnace set to 0
1/6/2011	9:25:53 AM	Helium valve closed
1/6/2011	9:25:53 AM	H2 valve closed
1/6/2011	9:25:53 AM	BCl3 valve closed
1/6/2011	9:25:53 AM	PH3 valve closed
1/6/2011	9:25:53 AM	SiCl4 pre valve closed
1/6/2011	9:25:53 AM	SiCl4 post valve closed
1/6/2011	9:25:53 AM	Bubbler valve closed
1/6/2011	9:25:53 AM	Main Vac valve opened
1/6/2011	9:25:53 AM	Bypass valve opened
1/6/2011	9:25:53 AM	Helium MFC set to  0.000000
1/6/2011	9:25:53 AM	H2 MFC set to  0.000000
1/6/2011	9:25:53 AM	BCl3 MFC set to  0.000000
1/6/2011	9:25:53 AM	PHl3 MFC set to  0.000000
1/6/2011	9:25:53 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:25:53 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:25:53 AM	Tube furnace set to 0
1/6/2011	9:26:53 AM	H2 valve closed
1/6/2011	9:26:53 AM	BCl3 valve closed
1/6/2011	9:26:53 AM	PH3 valve closed
1/6/2011	9:26:53 AM	SiCl4 pre valve closed
1/6/2011	9:26:53 AM	SiCl4 post valve closed
1/6/2011	9:26:53 AM	Bubbler valve closed
1/6/2011	9:26:53 AM	Helium valve opened
1/6/2011	9:26:53 AM	Main Vac valve opened
1/6/2011	9:26:53 AM	Bypass valve opened
1/6/2011	9:26:53 AM	Helium MFC set to  100.000000
1/6/2011	9:26:53 AM	H2 MFC set to  0.000000
1/6/2011	9:26:53 AM	BCl3 MFC set to  0.000000
1/6/2011	9:26:53 AM	PHl3 MFC set to  0.000000
1/6/2011	9:26:53 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:26:53 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:26:53 AM	Tube furnace set to 0
1/6/2011	9:27:53 AM	Helium valve closed
1/6/2011	9:27:53 AM	H2 valve closed
1/6/2011	9:27:53 AM	BCl3 valve closed
1/6/2011	9:27:53 AM	PH3 valve closed
1/6/2011	9:27:53 AM	SiCl4 pre valve closed
1/6/2011	9:27:53 AM	SiCl4 post valve closed
1/6/2011	9:27:53 AM	Bubbler valve closed
1/6/2011	9:27:53 AM	Main Vac valve opened
1/6/2011	9:27:53 AM	Bypass valve opened
1/6/2011	9:27:53 AM	Helium MFC set to  0.000000
1/6/2011	9:27:53 AM	H2 MFC set to  0.000000
1/6/2011	9:27:53 AM	BCl3 MFC set to  0.000000
1/6/2011	9:27:53 AM	PHl3 MFC set to  0.000000
1/6/2011	9:27:53 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:27:53 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:27:53 AM	Tube furnace set to 0
1/6/2011	9:28:53 AM	H2 valve closed
1/6/2011	9:28:53 AM	BCl3 valve closed
1/6/2011	9:28:53 AM	PH3 valve closed
1/6/2011	9:28:53 AM	SiCl4 pre valve closed
1/6/2011	9:28:53 AM	SiCl4 post valve closed
1/6/2011	9:28:53 AM	Bubbler valve closed
1/6/2011	9:28:53 AM	Helium valve opened
1/6/2011	9:28:53 AM	Main Vac valve opened
1/6/2011	9:28:53 AM	Bypass valve opened
1/6/2011	9:28:53 AM	Helium MFC set to  100.000000
1/6/2011	9:28:53 AM	H2 MFC set to  0.000000
1/6/2011	9:28:53 AM	BCl3 MFC set to  0.000000
1/6/2011	9:28:53 AM	PHl3 MFC set to  0.000000
1/6/2011	9:28:53 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:28:53 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:28:54 AM	Tube furnace set to 0
1/6/2011	9:29:54 AM	Helium valve closed
1/6/2011	9:29:54 AM	H2 valve closed
1/6/2011	9:29:54 AM	BCl3 valve closed
1/6/2011	9:29:54 AM	PH3 valve closed
1/6/2011	9:29:54 AM	SiCl4 pre valve closed
1/6/2011	9:29:54 AM	SiCl4 post valve closed
1/6/2011	9:29:54 AM	Bubbler valve closed
1/6/2011	9:29:54 AM	Main Vac valve opened
1/6/2011	9:29:54 AM	Bypass valve opened
1/6/2011	9:29:54 AM	Helium MFC set to  0.000000
1/6/2011	9:29:54 AM	H2 MFC set to  0.000000
1/6/2011	9:29:54 AM	BCl3 MFC set to  0.000000
1/6/2011	9:29:54 AM	PHl3 MFC set to  0.000000
1/6/2011	9:29:54 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:29:54 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:29:54 AM	Tube furnace set to 0
1/6/2011	9:30:54 AM	H2 valve closed
1/6/2011	9:30:54 AM	BCl3 valve closed
1/6/2011	9:30:54 AM	PH3 valve closed
1/6/2011	9:30:54 AM	SiCl4 pre valve closed
1/6/2011	9:30:54 AM	SiCl4 post valve closed
1/6/2011	9:30:54 AM	Bubbler valve closed
1/6/2011	9:30:54 AM	Helium valve opened
1/6/2011	9:30:54 AM	Main Vac valve opened
1/6/2011	9:30:54 AM	Bypass valve opened
1/6/2011	9:30:54 AM	Helium MFC set to  100.000000
1/6/2011	9:30:54 AM	H2 MFC set to  0.000000
1/6/2011	9:30:54 AM	BCl3 MFC set to  0.000000
1/6/2011	9:30:54 AM	PHl3 MFC set to  0.000000
1/6/2011	9:30:54 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:30:54 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:30:54 AM	Tube furnace set to 0
1/6/2011	9:31:54 AM	Helium valve closed
1/6/2011	9:31:54 AM	H2 valve closed
1/6/2011	9:31:54 AM	BCl3 valve closed
1/6/2011	9:31:54 AM	PH3 valve closed
1/6/2011	9:31:54 AM	SiCl4 pre valve closed
1/6/2011	9:31:54 AM	SiCl4 post valve closed
1/6/2011	9:31:54 AM	Bubbler valve closed
1/6/2011	9:31:54 AM	Main Vac valve opened
1/6/2011	9:31:54 AM	Bypass valve opened
1/6/2011	9:31:54 AM	Helium MFC set to  0.000000
1/6/2011	9:31:54 AM	H2 MFC set to  0.000000
1/6/2011	9:31:54 AM	BCl3 MFC set to  0.000000
1/6/2011	9:31:54 AM	PHl3 MFC set to  0.000000
1/6/2011	9:31:54 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:31:54 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:31:54 AM	Tube furnace set to 0
1/6/2011	9:32:54 AM	H2 valve closed
1/6/2011	9:32:54 AM	BCl3 valve closed
1/6/2011	9:32:54 AM	PH3 valve closed
1/6/2011	9:32:54 AM	SiCl4 pre valve closed
1/6/2011	9:32:54 AM	SiCl4 post valve closed
1/6/2011	9:32:54 AM	Bubbler valve closed
1/6/2011	9:32:54 AM	Helium valve opened
1/6/2011	9:32:54 AM	Main Vac valve opened
1/6/2011	9:32:54 AM	Bypass valve opened
1/6/2011	9:32:54 AM	Helium MFC set to  100.000000
1/6/2011	9:32:54 AM	H2 MFC set to  0.000000
1/6/2011	9:32:54 AM	BCl3 MFC set to  0.000000
1/6/2011	9:32:54 AM	PHl3 MFC set to  0.000000
1/6/2011	9:32:54 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:32:54 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:32:54 AM	Tube furnace set to 0
1/6/2011	9:33:54 AM	Helium valve closed
1/6/2011	9:33:54 AM	H2 valve closed
1/6/2011	9:33:54 AM	BCl3 valve closed
1/6/2011	9:33:54 AM	PH3 valve closed
1/6/2011	9:33:54 AM	SiCl4 pre valve closed
1/6/2011	9:33:54 AM	SiCl4 post valve closed
1/6/2011	9:33:54 AM	Bubbler valve closed
1/6/2011	9:33:54 AM	Main Vac valve opened
1/6/2011	9:33:54 AM	Bypass valve opened
1/6/2011	9:33:54 AM	Helium MFC set to  0.000000
1/6/2011	9:33:54 AM	H2 MFC set to  0.000000
1/6/2011	9:33:54 AM	BCl3 MFC set to  0.000000
1/6/2011	9:33:54 AM	PHl3 MFC set to  0.000000
1/6/2011	9:33:54 AM	SiCl4 MFC set to  0.000000
1/6/2011	9:33:54 AM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:33:55 AM	Tube furnace set to 0
1/6/2011	9:33:56 AM	Run finished at 9:33 AM
1/6/2011	9:33:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	1:24:39 PM	Recipe started at 1:24 PM
1/6/2011	1:24:39 PM	Helium valve closed
1/6/2011	1:24:39 PM	BCl3 valve closed
1/6/2011	1:24:39 PM	PH3 valve closed
1/6/2011	1:24:39 PM	SiCl4 pre valve closed
1/6/2011	1:24:39 PM	SiCl4 post valve closed
1/6/2011	1:24:39 PM	Main Vac valve closed
1/6/2011	1:24:39 PM	Bypass valve closed
1/6/2011	1:24:39 PM	Bubbler valve closed
1/6/2011	1:24:39 PM	H2 valve opened
1/6/2011	1:24:39 PM	Helium MFC set to  0.000000
1/6/2011	1:24:39 PM	H2 MFC set to  500.000000
1/6/2011	1:24:39 PM	BCl3 MFC set to  0.000000
1/6/2011	1:24:39 PM	PHl3 MFC set to  0.000000
1/6/2011	1:24:39 PM	SiCl4 MFC set to  0.000000
1/6/2011	1:24:39 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	1:24:40 PM	Tube furnace set to 0
1/6/2011	1:26:03 PM	Helium valve closed
1/6/2011	1:26:03 PM	BCl3 valve closed
1/6/2011	1:26:03 PM	PH3 valve closed
1/6/2011	1:26:03 PM	SiCl4 pre valve closed
1/6/2011	1:26:03 PM	SiCl4 post valve closed
1/6/2011	1:26:03 PM	Main Vac valve closed
1/6/2011	1:26:03 PM	Bypass valve closed
1/6/2011	1:26:03 PM	H2 valve opened
1/6/2011	1:26:03 PM	Bubbler valve opened
1/6/2011	1:26:03 PM	Helium MFC set to  0.000000
1/6/2011	1:26:03 PM	H2 MFC set to  500.000000
1/6/2011	1:26:03 PM	BCl3 MFC set to  0.000000
1/6/2011	1:26:03 PM	PHl3 MFC set to  0.000000
1/6/2011	1:26:03 PM	SiCl4 MFC set to  0.000000
1/6/2011	1:26:03 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	1:26:03 PM	Tube furnace set to 1000
1/6/2011	1:46:03 PM	Helium valve closed
1/6/2011	1:46:03 PM	PH3 valve closed
1/6/2011	1:46:03 PM	Main Vac valve closed
1/6/2011	1:46:03 PM	Bypass valve closed
1/6/2011	1:46:03 PM	H2 valve opened
1/6/2011	1:46:03 PM	BCl3 valve opened
1/6/2011	1:46:03 PM	SiCl4 pre valve opened
1/6/2011	1:46:03 PM	SiCl4 post valve opened
1/6/2011	1:46:03 PM	Bubbler valve opened
1/6/2011	1:46:03 PM	Helium MFC set to  0.000000
1/6/2011	1:46:03 PM	H2 MFC set to  500.000000
1/6/2011	1:46:03 PM	BCl3 MFC set to  1.750000
1/6/2011	1:46:03 PM	PHl3 MFC set to  0.000000
1/6/2011	1:46:03 PM	SiCl4 MFC set to  50.000000
1/6/2011	1:46:03 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	1:46:03 PM	Tube furnace set to 1000
1/6/2011	2:01:03 PM	H2 valve closed
1/6/2011	2:01:03 PM	BCl3 valve closed
1/6/2011	2:01:03 PM	PH3 valve closed
1/6/2011	2:01:03 PM	SiCl4 pre valve closed
1/6/2011	2:01:03 PM	SiCl4 post valve closed
1/6/2011	2:01:03 PM	Main Vac valve closed
1/6/2011	2:01:03 PM	Bypass valve closed
1/6/2011	2:01:03 PM	Helium valve opened
1/6/2011	2:01:03 PM	Bubbler valve opened
1/6/2011	2:01:03 PM	Helium MFC set to  500.000000
1/6/2011	2:01:03 PM	H2 MFC set to  0.000000
1/6/2011	2:01:03 PM	BCl3 MFC set to  0.000000
1/6/2011	2:01:03 PM	PHl3 MFC set to  0.000000
1/6/2011	2:01:03 PM	SiCl4 MFC set to  0.000000
1/6/2011	2:01:03 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	2:01:03 PM	Tube furnace set to 0
1/6/2011	2:21:03 PM	Helium valve closed
1/6/2011	2:21:03 PM	H2 valve closed
1/6/2011	2:21:03 PM	BCl3 valve closed
1/6/2011	2:21:03 PM	PH3 valve closed
1/6/2011	2:21:03 PM	SiCl4 pre valve closed
1/6/2011	2:21:03 PM	SiCl4 post valve closed
1/6/2011	2:21:03 PM	Main Vac valve closed
1/6/2011	2:21:03 PM	Bypass valve closed
1/6/2011	2:21:03 PM	Bubbler valve closed
1/6/2011	2:21:03 PM	Helium MFC set to  0.000000
1/6/2011	2:21:03 PM	H2 MFC set to  0.000000
1/6/2011	2:21:03 PM	BCl3 MFC set to  0.000000
1/6/2011	2:21:03 PM	PHl3 MFC set to  0.000000
1/6/2011	2:21:03 PM	SiCl4 MFC set to  0.000000
1/6/2011	2:21:03 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	2:21:04 PM	Tube furnace set to 0
1/6/2011	2:21:04 PM	Run finished at 2:21 PM
1/6/2011	3:09:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	3:09:10 PM	Recipe started at 3:09 PM
1/6/2011	3:09:10 PM	Helium valve closed
1/6/2011	3:09:10 PM	H2 valve closed
1/6/2011	3:09:10 PM	BCl3 valve closed
1/6/2011	3:09:10 PM	PH3 valve closed
1/6/2011	3:09:10 PM	SiCl4 pre valve closed
1/6/2011	3:09:10 PM	SiCl4 post valve closed
1/6/2011	3:09:10 PM	Main Vac valve closed
1/6/2011	3:09:10 PM	Bubbler valve closed
1/6/2011	3:09:10 PM	Bypass valve opened
1/6/2011	3:09:10 PM	Helium MFC set to  0.000000
1/6/2011	3:09:10 PM	H2 MFC set to  0.000000
1/6/2011	3:09:10 PM	BCl3 MFC set to  0.000000
1/6/2011	3:09:10 PM	PHl3 MFC set to  0.000000
1/6/2011	3:09:10 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:09:10 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:09:10 PM	Tube furnace set to 0
1/6/2011	3:10:13 PM	Helium valve closed
1/6/2011	3:10:14 PM	H2 valve closed
1/6/2011	3:10:14 PM	BCl3 valve closed
1/6/2011	3:10:14 PM	PH3 valve closed
1/6/2011	3:10:14 PM	SiCl4 pre valve closed
1/6/2011	3:10:14 PM	SiCl4 post valve closed
1/6/2011	3:10:14 PM	Bubbler valve closed
1/6/2011	3:10:14 PM	Main Vac valve opened
1/6/2011	3:10:14 PM	Bypass valve opened
1/6/2011	3:10:14 PM	Helium MFC set to  0.000000
1/6/2011	3:10:14 PM	H2 MFC set to  0.000000
1/6/2011	3:10:14 PM	BCl3 MFC set to  0.000000
1/6/2011	3:10:14 PM	PHl3 MFC set to  0.000000
1/6/2011	3:10:14 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:10:14 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:10:14 PM	Tube furnace set to 0
1/6/2011	3:10:14 PM	Run finished at 3:10 PM
1/6/2011	3:10:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	3:17:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	3:17:25 PM	Recipe started at 3:17 PM
1/6/2011	3:17:25 PM	Helium valve closed
1/6/2011	3:17:25 PM	H2 valve closed
1/6/2011	3:17:25 PM	BCl3 valve closed
1/6/2011	3:17:25 PM	PH3 valve closed
1/6/2011	3:17:25 PM	SiCl4 pre valve closed
1/6/2011	3:17:25 PM	SiCl4 post valve closed
1/6/2011	3:17:25 PM	Main Vac valve closed
1/6/2011	3:17:25 PM	Bubbler valve closed
1/6/2011	3:17:25 PM	Bypass valve opened
1/6/2011	3:17:25 PM	Helium MFC set to  0.000000
1/6/2011	3:17:25 PM	H2 MFC set to  0.000000
1/6/2011	3:17:25 PM	BCl3 MFC set to  0.000000
1/6/2011	3:17:25 PM	PHl3 MFC set to  0.000000
1/6/2011	3:17:25 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:17:25 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:17:25 PM	Tube furnace set to 0
1/6/2011	3:17:25 PM	Helium valve closed
1/6/2011	3:17:25 PM	H2 valve closed
1/6/2011	3:17:25 PM	BCl3 valve closed
1/6/2011	3:17:25 PM	PH3 valve closed
1/6/2011	3:17:25 PM	SiCl4 pre valve closed
1/6/2011	3:17:25 PM	SiCl4 post valve closed
1/6/2011	3:17:25 PM	Bubbler valve closed
1/6/2011	3:17:25 PM	Main Vac valve opened
1/6/2011	3:17:25 PM	Bypass valve opened
1/6/2011	3:17:25 PM	Helium MFC set to  0.000000
1/6/2011	3:17:25 PM	H2 MFC set to  0.000000
1/6/2011	3:17:25 PM	BCl3 MFC set to  0.000000
1/6/2011	3:17:25 PM	PHl3 MFC set to  0.000000
1/6/2011	3:17:25 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:17:25 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:17:25 PM	Tube furnace set to 0
1/6/2011	3:18:25 PM	H2 valve closed
1/6/2011	3:18:25 PM	BCl3 valve closed
1/6/2011	3:18:25 PM	PH3 valve closed
1/6/2011	3:18:25 PM	SiCl4 pre valve closed
1/6/2011	3:18:25 PM	SiCl4 post valve closed
1/6/2011	3:18:25 PM	Bubbler valve closed
1/6/2011	3:18:25 PM	Helium valve opened
1/6/2011	3:18:25 PM	Main Vac valve opened
1/6/2011	3:18:25 PM	Bypass valve opened
1/6/2011	3:18:25 PM	Helium MFC set to  100.000000
1/6/2011	3:18:25 PM	H2 MFC set to  0.000000
1/6/2011	3:18:25 PM	BCl3 MFC set to  0.000000
1/6/2011	3:18:25 PM	PHl3 MFC set to  0.000000
1/6/2011	3:18:25 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:18:25 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:18:26 PM	Tube furnace set to 0
1/6/2011	3:19:26 PM	Helium valve closed
1/6/2011	3:19:26 PM	H2 valve closed
1/6/2011	3:19:26 PM	BCl3 valve closed
1/6/2011	3:19:26 PM	PH3 valve closed
1/6/2011	3:19:26 PM	SiCl4 pre valve closed
1/6/2011	3:19:26 PM	SiCl4 post valve closed
1/6/2011	3:19:26 PM	Bubbler valve closed
1/6/2011	3:19:26 PM	Main Vac valve opened
1/6/2011	3:19:26 PM	Bypass valve opened
1/6/2011	3:19:26 PM	Helium MFC set to  0.000000
1/6/2011	3:19:26 PM	H2 MFC set to  0.000000
1/6/2011	3:19:26 PM	BCl3 MFC set to  0.000000
1/6/2011	3:19:26 PM	PHl3 MFC set to  0.000000
1/6/2011	3:19:26 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:19:26 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:19:26 PM	Tube furnace set to 0
1/6/2011	3:20:26 PM	H2 valve closed
1/6/2011	3:20:26 PM	BCl3 valve closed
1/6/2011	3:20:26 PM	PH3 valve closed
1/6/2011	3:20:26 PM	SiCl4 pre valve closed
1/6/2011	3:20:26 PM	SiCl4 post valve closed
1/6/2011	3:20:26 PM	Bubbler valve closed
1/6/2011	3:20:26 PM	Helium valve opened
1/6/2011	3:20:26 PM	Main Vac valve opened
1/6/2011	3:20:26 PM	Bypass valve opened
1/6/2011	3:20:26 PM	Helium MFC set to  100.000000
1/6/2011	3:20:26 PM	H2 MFC set to  0.000000
1/6/2011	3:20:26 PM	BCl3 MFC set to  0.000000
1/6/2011	3:20:26 PM	PHl3 MFC set to  0.000000
1/6/2011	3:20:26 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:20:26 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:20:26 PM	Tube furnace set to 0
1/6/2011	3:21:26 PM	Helium valve closed
1/6/2011	3:21:26 PM	H2 valve closed
1/6/2011	3:21:26 PM	BCl3 valve closed
1/6/2011	3:21:26 PM	PH3 valve closed
1/6/2011	3:21:26 PM	SiCl4 pre valve closed
1/6/2011	3:21:26 PM	SiCl4 post valve closed
1/6/2011	3:21:26 PM	Bubbler valve closed
1/6/2011	3:21:26 PM	Main Vac valve opened
1/6/2011	3:21:26 PM	Bypass valve opened
1/6/2011	3:21:26 PM	Helium MFC set to  0.000000
1/6/2011	3:21:26 PM	H2 MFC set to  0.000000
1/6/2011	3:21:26 PM	BCl3 MFC set to  0.000000
1/6/2011	3:21:26 PM	PHl3 MFC set to  0.000000
1/6/2011	3:21:26 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:21:26 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:21:26 PM	Tube furnace set to 0
1/6/2011	3:22:26 PM	H2 valve closed
1/6/2011	3:22:26 PM	BCl3 valve closed
1/6/2011	3:22:26 PM	PH3 valve closed
1/6/2011	3:22:26 PM	SiCl4 pre valve closed
1/6/2011	3:22:26 PM	SiCl4 post valve closed
1/6/2011	3:22:26 PM	Bubbler valve closed
1/6/2011	3:22:26 PM	Helium valve opened
1/6/2011	3:22:26 PM	Main Vac valve opened
1/6/2011	3:22:26 PM	Bypass valve opened
1/6/2011	3:22:26 PM	Helium MFC set to  100.000000
1/6/2011	3:22:26 PM	H2 MFC set to  0.000000
1/6/2011	3:22:26 PM	BCl3 MFC set to  0.000000
1/6/2011	3:22:26 PM	PHl3 MFC set to  0.000000
1/6/2011	3:22:26 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:22:26 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:22:26 PM	Tube furnace set to 0
1/6/2011	3:23:26 PM	Helium valve closed
1/6/2011	3:23:26 PM	H2 valve closed
1/6/2011	3:23:26 PM	BCl3 valve closed
1/6/2011	3:23:26 PM	PH3 valve closed
1/6/2011	3:23:27 PM	SiCl4 pre valve closed
1/6/2011	3:23:27 PM	SiCl4 post valve closed
1/6/2011	3:23:27 PM	Bubbler valve closed
1/6/2011	3:23:27 PM	Main Vac valve opened
1/6/2011	3:23:27 PM	Bypass valve opened
1/6/2011	3:23:27 PM	Helium MFC set to  0.000000
1/6/2011	3:23:27 PM	H2 MFC set to  0.000000
1/6/2011	3:23:27 PM	BCl3 MFC set to  0.000000
1/6/2011	3:23:27 PM	PHl3 MFC set to  0.000000
1/6/2011	3:23:27 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:23:27 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:23:27 PM	Tube furnace set to 0
1/6/2011	3:24:27 PM	H2 valve closed
1/6/2011	3:24:27 PM	BCl3 valve closed
1/6/2011	3:24:27 PM	PH3 valve closed
1/6/2011	3:24:27 PM	SiCl4 pre valve closed
1/6/2011	3:24:27 PM	SiCl4 post valve closed
1/6/2011	3:24:27 PM	Bubbler valve closed
1/6/2011	3:24:27 PM	Helium valve opened
1/6/2011	3:24:27 PM	Main Vac valve opened
1/6/2011	3:24:27 PM	Bypass valve opened
1/6/2011	3:24:27 PM	Helium MFC set to  100.000000
1/6/2011	3:24:27 PM	H2 MFC set to  0.000000
1/6/2011	3:24:27 PM	BCl3 MFC set to  0.000000
1/6/2011	3:24:27 PM	PHl3 MFC set to  0.000000
1/6/2011	3:24:27 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:24:27 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:24:27 PM	Tube furnace set to 0
1/6/2011	3:25:27 PM	Helium valve closed
1/6/2011	3:25:27 PM	H2 valve closed
1/6/2011	3:25:27 PM	BCl3 valve closed
1/6/2011	3:25:27 PM	PH3 valve closed
1/6/2011	3:25:27 PM	SiCl4 pre valve closed
1/6/2011	3:25:27 PM	SiCl4 post valve closed
1/6/2011	3:25:27 PM	Bubbler valve closed
1/6/2011	3:25:27 PM	Main Vac valve opened
1/6/2011	3:25:27 PM	Bypass valve opened
1/6/2011	3:25:27 PM	Helium MFC set to  0.000000
1/6/2011	3:25:27 PM	H2 MFC set to  0.000000
1/6/2011	3:25:27 PM	BCl3 MFC set to  0.000000
1/6/2011	3:25:27 PM	PHl3 MFC set to  0.000000
1/6/2011	3:25:27 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:25:27 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:25:27 PM	Tube furnace set to 0
1/6/2011	3:26:27 PM	H2 valve closed
1/6/2011	3:26:27 PM	BCl3 valve closed
1/6/2011	3:26:27 PM	PH3 valve closed
1/6/2011	3:26:27 PM	SiCl4 pre valve closed
1/6/2011	3:26:27 PM	SiCl4 post valve closed
1/6/2011	3:26:27 PM	Bubbler valve closed
1/6/2011	3:26:27 PM	Helium valve opened
1/6/2011	3:26:27 PM	Main Vac valve opened
1/6/2011	3:26:27 PM	Bypass valve opened
1/6/2011	3:26:27 PM	Helium MFC set to  100.000000
1/6/2011	3:26:27 PM	H2 MFC set to  0.000000
1/6/2011	3:26:27 PM	BCl3 MFC set to  0.000000
1/6/2011	3:26:27 PM	PHl3 MFC set to  0.000000
1/6/2011	3:26:27 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:26:27 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:26:27 PM	Tube furnace set to 0
1/6/2011	3:27:27 PM	Helium valve closed
1/6/2011	3:27:27 PM	H2 valve closed
1/6/2011	3:27:27 PM	BCl3 valve closed
1/6/2011	3:27:27 PM	PH3 valve closed
1/6/2011	3:27:27 PM	SiCl4 pre valve closed
1/6/2011	3:27:27 PM	SiCl4 post valve closed
1/6/2011	3:27:27 PM	Bubbler valve closed
1/6/2011	3:27:27 PM	Main Vac valve opened
1/6/2011	3:27:27 PM	Bypass valve opened
1/6/2011	3:27:27 PM	Helium MFC set to  0.000000
1/6/2011	3:27:27 PM	H2 MFC set to  0.000000
1/6/2011	3:27:27 PM	BCl3 MFC set to  0.000000
1/6/2011	3:27:27 PM	PHl3 MFC set to  0.000000
1/6/2011	3:27:27 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:27:27 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:27:27 PM	Tube furnace set to 0
1/6/2011	3:28:27 PM	H2 valve closed
1/6/2011	3:28:28 PM	BCl3 valve closed
1/6/2011	3:28:28 PM	PH3 valve closed
1/6/2011	3:28:28 PM	SiCl4 pre valve closed
1/6/2011	3:28:28 PM	SiCl4 post valve closed
1/6/2011	3:28:28 PM	Bubbler valve closed
1/6/2011	3:28:28 PM	Helium valve opened
1/6/2011	3:28:28 PM	Main Vac valve opened
1/6/2011	3:28:28 PM	Bypass valve opened
1/6/2011	3:28:28 PM	Helium MFC set to  100.000000
1/6/2011	3:28:28 PM	H2 MFC set to  0.000000
1/6/2011	3:28:28 PM	BCl3 MFC set to  0.000000
1/6/2011	3:28:28 PM	PHl3 MFC set to  0.000000
1/6/2011	3:28:28 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:28:28 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:28:28 PM	Tube furnace set to 0
1/6/2011	3:29:28 PM	Helium valve closed
1/6/2011	3:29:28 PM	H2 valve closed
1/6/2011	3:29:28 PM	BCl3 valve closed
1/6/2011	3:29:28 PM	PH3 valve closed
1/6/2011	3:29:28 PM	SiCl4 pre valve closed
1/6/2011	3:29:28 PM	SiCl4 post valve closed
1/6/2011	3:29:28 PM	Bubbler valve closed
1/6/2011	3:29:28 PM	Main Vac valve opened
1/6/2011	3:29:28 PM	Bypass valve opened
1/6/2011	3:29:28 PM	Helium MFC set to  0.000000
1/6/2011	3:29:28 PM	H2 MFC set to  0.000000
1/6/2011	3:29:28 PM	BCl3 MFC set to  0.000000
1/6/2011	3:29:28 PM	PHl3 MFC set to  0.000000
1/6/2011	3:29:28 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:29:28 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:29:28 PM	Tube furnace set to 0
1/6/2011	3:30:28 PM	H2 valve closed
1/6/2011	3:30:28 PM	BCl3 valve closed
1/6/2011	3:30:28 PM	PH3 valve closed
1/6/2011	3:30:28 PM	SiCl4 pre valve closed
1/6/2011	3:30:28 PM	SiCl4 post valve closed
1/6/2011	3:30:28 PM	Bubbler valve closed
1/6/2011	3:30:28 PM	Helium valve opened
1/6/2011	3:30:28 PM	Main Vac valve opened
1/6/2011	3:30:28 PM	Bypass valve opened
1/6/2011	3:30:28 PM	Helium MFC set to  100.000000
1/6/2011	3:30:28 PM	H2 MFC set to  0.000000
1/6/2011	3:30:28 PM	BCl3 MFC set to  0.000000
1/6/2011	3:30:28 PM	PHl3 MFC set to  0.000000
1/6/2011	3:30:28 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:30:28 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:30:28 PM	Tube furnace set to 0
1/6/2011	3:31:28 PM	Helium valve closed
1/6/2011	3:31:28 PM	H2 valve closed
1/6/2011	3:31:28 PM	BCl3 valve closed
1/6/2011	3:31:28 PM	PH3 valve closed
1/6/2011	3:31:28 PM	SiCl4 pre valve closed
1/6/2011	3:31:28 PM	SiCl4 post valve closed
1/6/2011	3:31:28 PM	Bubbler valve closed
1/6/2011	3:31:28 PM	Main Vac valve opened
1/6/2011	3:31:28 PM	Bypass valve opened
1/6/2011	3:31:28 PM	Helium MFC set to  0.000000
1/6/2011	3:31:28 PM	H2 MFC set to  0.000000
1/6/2011	3:31:28 PM	BCl3 MFC set to  0.000000
1/6/2011	3:31:28 PM	PHl3 MFC set to  0.000000
1/6/2011	3:31:28 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:31:28 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:31:28 PM	Tube furnace set to 0
1/6/2011	3:32:28 PM	H2 valve closed
1/6/2011	3:32:28 PM	BCl3 valve closed
1/6/2011	3:32:28 PM	PH3 valve closed
1/6/2011	3:32:28 PM	SiCl4 pre valve closed
1/6/2011	3:32:28 PM	SiCl4 post valve closed
1/6/2011	3:32:28 PM	Bubbler valve closed
1/6/2011	3:32:28 PM	Helium valve opened
1/6/2011	3:32:28 PM	Main Vac valve opened
1/6/2011	3:32:28 PM	Bypass valve opened
1/6/2011	3:32:28 PM	Helium MFC set to  100.000000
1/6/2011	3:32:28 PM	H2 MFC set to  0.000000
1/6/2011	3:32:28 PM	BCl3 MFC set to  0.000000
1/6/2011	3:32:28 PM	PHl3 MFC set to  0.000000
1/6/2011	3:32:28 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:32:28 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:32:29 PM	Tube furnace set to 0
1/6/2011	3:33:29 PM	Helium valve closed
1/6/2011	3:33:29 PM	H2 valve closed
1/6/2011	3:33:29 PM	BCl3 valve closed
1/6/2011	3:33:29 PM	PH3 valve closed
1/6/2011	3:33:29 PM	SiCl4 pre valve closed
1/6/2011	3:33:29 PM	SiCl4 post valve closed
1/6/2011	3:33:29 PM	Bubbler valve closed
1/6/2011	3:33:29 PM	Main Vac valve opened
1/6/2011	3:33:29 PM	Bypass valve opened
1/6/2011	3:33:29 PM	Helium MFC set to  0.000000
1/6/2011	3:33:29 PM	H2 MFC set to  0.000000
1/6/2011	3:33:29 PM	BCl3 MFC set to  0.000000
1/6/2011	3:33:29 PM	PHl3 MFC set to  0.000000
1/6/2011	3:33:29 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:33:29 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:33:29 PM	Tube furnace set to 0
1/6/2011	3:34:29 PM	H2 valve closed
1/6/2011	3:34:29 PM	BCl3 valve closed
1/6/2011	3:34:29 PM	PH3 valve closed
1/6/2011	3:34:29 PM	SiCl4 pre valve closed
1/6/2011	3:34:29 PM	SiCl4 post valve closed
1/6/2011	3:34:29 PM	Bubbler valve closed
1/6/2011	3:34:29 PM	Helium valve opened
1/6/2011	3:34:29 PM	Main Vac valve opened
1/6/2011	3:34:29 PM	Bypass valve opened
1/6/2011	3:34:29 PM	Helium MFC set to  100.000000
1/6/2011	3:34:29 PM	H2 MFC set to  0.000000
1/6/2011	3:34:29 PM	BCl3 MFC set to  0.000000
1/6/2011	3:34:29 PM	PHl3 MFC set to  0.000000
1/6/2011	3:34:29 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:34:29 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:34:29 PM	Tube furnace set to 0
1/6/2011	3:35:29 PM	Helium valve closed
1/6/2011	3:35:29 PM	H2 valve closed
1/6/2011	3:35:29 PM	BCl3 valve closed
1/6/2011	3:35:29 PM	PH3 valve closed
1/6/2011	3:35:29 PM	SiCl4 pre valve closed
1/6/2011	3:35:29 PM	SiCl4 post valve closed
1/6/2011	3:35:29 PM	Bubbler valve closed
1/6/2011	3:35:29 PM	Main Vac valve opened
1/6/2011	3:35:29 PM	Bypass valve opened
1/6/2011	3:35:29 PM	Helium MFC set to  0.000000
1/6/2011	3:35:29 PM	H2 MFC set to  0.000000
1/6/2011	3:35:29 PM	BCl3 MFC set to  0.000000
1/6/2011	3:35:29 PM	PHl3 MFC set to  0.000000
1/6/2011	3:35:29 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:35:29 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:35:29 PM	Tube furnace set to 0
1/6/2011	3:36:29 PM	H2 valve closed
1/6/2011	3:36:29 PM	BCl3 valve closed
1/6/2011	3:36:29 PM	PH3 valve closed
1/6/2011	3:36:29 PM	SiCl4 pre valve closed
1/6/2011	3:36:29 PM	SiCl4 post valve closed
1/6/2011	3:36:29 PM	Bubbler valve closed
1/6/2011	3:36:29 PM	Helium valve opened
1/6/2011	3:36:29 PM	Main Vac valve opened
1/6/2011	3:36:29 PM	Bypass valve opened
1/6/2011	3:36:29 PM	Helium MFC set to  100.000000
1/6/2011	3:36:29 PM	H2 MFC set to  0.000000
1/6/2011	3:36:29 PM	BCl3 MFC set to  0.000000
1/6/2011	3:36:29 PM	PHl3 MFC set to  0.000000
1/6/2011	3:36:29 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:36:29 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:36:29 PM	Tube furnace set to 0
1/6/2011	3:37:29 PM	Helium valve closed
1/6/2011	3:37:29 PM	H2 valve closed
1/6/2011	3:37:29 PM	BCl3 valve closed
1/6/2011	3:37:29 PM	PH3 valve closed
1/6/2011	3:37:29 PM	SiCl4 pre valve closed
1/6/2011	3:37:29 PM	SiCl4 post valve closed
1/6/2011	3:37:29 PM	Bubbler valve closed
1/6/2011	3:37:29 PM	Main Vac valve opened
1/6/2011	3:37:29 PM	Bypass valve opened
1/6/2011	3:37:29 PM	Helium MFC set to  0.000000
1/6/2011	3:37:29 PM	H2 MFC set to  0.000000
1/6/2011	3:37:29 PM	BCl3 MFC set to  0.000000
1/6/2011	3:37:29 PM	PHl3 MFC set to  0.000000
1/6/2011	3:37:29 PM	SiCl4 MFC set to  0.000000
1/6/2011	3:37:29 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	3:37:30 PM	Tube furnace set to 0
1/6/2011	3:37:31 PM	Run finished at 3:37 PM
1/6/2011	3:37:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/6/2011	6:03:35 PM	Recipe started at 6:03 PM
1/6/2011	6:03:35 PM	Helium valve closed
1/6/2011	6:03:35 PM	BCl3 valve closed
1/6/2011	6:03:35 PM	PH3 valve closed
1/6/2011	6:03:35 PM	SiCl4 pre valve closed
1/6/2011	6:03:35 PM	SiCl4 post valve closed
1/6/2011	6:03:35 PM	Main Vac valve closed
1/6/2011	6:03:35 PM	Bypass valve closed
1/6/2011	6:03:35 PM	Bubbler valve closed
1/6/2011	6:03:35 PM	H2 valve opened
1/6/2011	6:03:35 PM	Helium MFC set to  0.000000
1/6/2011	6:03:35 PM	H2 MFC set to  500.000000
1/6/2011	6:03:35 PM	BCl3 MFC set to  0.000000
1/6/2011	6:03:35 PM	PHl3 MFC set to  0.000000
1/6/2011	6:03:35 PM	SiCl4 MFC set to  0.000000
1/6/2011	6:03:35 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	6:03:35 PM	Tube furnace set to 0
1/6/2011	6:04:57 PM	Helium valve closed
1/6/2011	6:04:57 PM	BCl3 valve closed
1/6/2011	6:04:57 PM	PH3 valve closed
1/6/2011	6:04:57 PM	SiCl4 pre valve closed
1/6/2011	6:04:57 PM	SiCl4 post valve closed
1/6/2011	6:04:57 PM	Main Vac valve closed
1/6/2011	6:04:57 PM	Bypass valve closed
1/6/2011	6:04:57 PM	H2 valve opened
1/6/2011	6:04:57 PM	Bubbler valve opened
1/6/2011	6:04:57 PM	Helium MFC set to  0.000000
1/6/2011	6:04:57 PM	H2 MFC set to  500.000000
1/6/2011	6:04:57 PM	BCl3 MFC set to  0.000000
1/6/2011	6:04:57 PM	PHl3 MFC set to  0.000000
1/6/2011	6:04:57 PM	SiCl4 MFC set to  0.000000
1/6/2011	6:04:57 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	6:04:57 PM	Tube furnace set to 1000
1/6/2011	6:24:57 PM	Helium valve closed
1/6/2011	6:24:57 PM	PH3 valve closed
1/6/2011	6:24:57 PM	Main Vac valve closed
1/6/2011	6:24:57 PM	Bypass valve closed
1/6/2011	6:24:57 PM	H2 valve opened
1/6/2011	6:24:57 PM	BCl3 valve opened
1/6/2011	6:24:57 PM	SiCl4 pre valve opened
1/6/2011	6:24:57 PM	SiCl4 post valve opened
1/6/2011	6:24:57 PM	Bubbler valve opened
1/6/2011	6:24:57 PM	Helium MFC set to  0.000000
1/6/2011	6:24:57 PM	H2 MFC set to  500.000000
1/6/2011	6:24:57 PM	BCl3 MFC set to  1.800000
1/6/2011	6:24:57 PM	PHl3 MFC set to  0.000000
1/6/2011	6:24:57 PM	SiCl4 MFC set to  50.000000
1/6/2011	6:24:57 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	6:24:57 PM	Tube furnace set to 1000
1/6/2011	6:39:57 PM	H2 valve closed
1/6/2011	6:39:57 PM	BCl3 valve closed
1/6/2011	6:39:57 PM	PH3 valve closed
1/6/2011	6:39:57 PM	SiCl4 pre valve closed
1/6/2011	6:39:57 PM	SiCl4 post valve closed
1/6/2011	6:39:57 PM	Main Vac valve closed
1/6/2011	6:39:57 PM	Bypass valve closed
1/6/2011	6:39:57 PM	Helium valve opened
1/6/2011	6:39:57 PM	Bubbler valve opened
1/6/2011	6:39:57 PM	Helium MFC set to  500.000000
1/6/2011	6:39:57 PM	H2 MFC set to  0.000000
1/6/2011	6:39:57 PM	BCl3 MFC set to  0.000000
1/6/2011	6:39:57 PM	PHl3 MFC set to  0.000000
1/6/2011	6:39:57 PM	SiCl4 MFC set to  0.000000
1/6/2011	6:39:57 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	6:39:58 PM	Tube furnace set to 0
1/6/2011	6:59:58 PM	Helium valve closed
1/6/2011	6:59:58 PM	H2 valve closed
1/6/2011	6:59:58 PM	BCl3 valve closed
1/6/2011	6:59:58 PM	PH3 valve closed
1/6/2011	6:59:58 PM	SiCl4 pre valve closed
1/6/2011	6:59:58 PM	SiCl4 post valve closed
1/6/2011	6:59:58 PM	Main Vac valve closed
1/6/2011	6:59:58 PM	Bypass valve closed
1/6/2011	6:59:58 PM	Bubbler valve closed
1/6/2011	6:59:58 PM	Helium MFC set to  0.000000
1/6/2011	6:59:58 PM	H2 MFC set to  0.000000
1/6/2011	6:59:58 PM	BCl3 MFC set to  0.000000
1/6/2011	6:59:58 PM	PHl3 MFC set to  0.000000
1/6/2011	6:59:58 PM	SiCl4 MFC set to  0.000000
1/6/2011	6:59:58 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	6:59:58 PM	Tube furnace set to 0
1/6/2011	6:59:58 PM	Run finished at 6:59 PM
1/6/2011	7:10:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	7:10:36 PM	Recipe started at 7:10 PM
1/6/2011	7:10:36 PM	Helium valve closed
1/6/2011	7:10:36 PM	H2 valve closed
1/6/2011	7:10:36 PM	BCl3 valve closed
1/6/2011	7:10:36 PM	PH3 valve closed
1/6/2011	7:10:36 PM	SiCl4 pre valve closed
1/6/2011	7:10:36 PM	SiCl4 post valve closed
1/6/2011	7:10:36 PM	Main Vac valve closed
1/6/2011	7:10:36 PM	Bubbler valve closed
1/6/2011	7:10:36 PM	Bypass valve opened
1/6/2011	7:10:36 PM	Helium MFC set to  0.000000
1/6/2011	7:10:36 PM	H2 MFC set to  0.000000
1/6/2011	7:10:36 PM	BCl3 MFC set to  0.000000
1/6/2011	7:10:36 PM	PHl3 MFC set to  0.000000
1/6/2011	7:10:36 PM	SiCl4 MFC set to  0.000000
1/6/2011	7:10:36 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:10:37 PM	Tube furnace set to 0
1/6/2011	7:11:37 PM	Helium valve closed
1/6/2011	7:11:37 PM	H2 valve closed
1/6/2011	7:11:37 PM	BCl3 valve closed
1/6/2011	7:11:37 PM	PH3 valve closed
1/6/2011	7:11:37 PM	SiCl4 pre valve closed
1/6/2011	7:11:37 PM	SiCl4 post valve closed
1/6/2011	7:11:37 PM	Bubbler valve closed
1/6/2011	7:11:37 PM	Main Vac valve opened
1/6/2011	7:11:37 PM	Bypass valve opened
1/6/2011	7:11:37 PM	Helium MFC set to  0.000000
1/6/2011	7:11:37 PM	H2 MFC set to  0.000000
1/6/2011	7:11:37 PM	BCl3 MFC set to  0.000000
1/6/2011	7:11:37 PM	PHl3 MFC set to  0.000000
1/6/2011	7:11:37 PM	SiCl4 MFC set to  0.000000
1/6/2011	7:11:37 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	7:11:37 PM	Tube furnace set to 0
1/6/2011	7:11:37 PM	Run finished at 7:11 PM
1/6/2011	7:11:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	9:25:28 PM	Recipe started at 9:25 PM
1/6/2011	9:25:29 PM	Helium valve closed
1/6/2011	9:25:29 PM	BCl3 valve closed
1/6/2011	9:25:29 PM	PH3 valve closed
1/6/2011	9:25:29 PM	SiCl4 pre valve closed
1/6/2011	9:25:29 PM	SiCl4 post valve closed
1/6/2011	9:25:29 PM	Main Vac valve closed
1/6/2011	9:25:29 PM	Bypass valve closed
1/6/2011	9:25:29 PM	Bubbler valve closed
1/6/2011	9:25:29 PM	H2 valve opened
1/6/2011	9:25:29 PM	Helium MFC set to  0.000000
1/6/2011	9:25:29 PM	H2 MFC set to  500.000000
1/6/2011	9:25:29 PM	BCl3 MFC set to  0.000000
1/6/2011	9:25:29 PM	PHl3 MFC set to  0.000000
1/6/2011	9:25:29 PM	SiCl4 MFC set to  0.000000
1/6/2011	9:25:29 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:25:29 PM	Tube furnace set to 0
1/6/2011	9:26:49 PM	Helium valve closed
1/6/2011	9:26:49 PM	BCl3 valve closed
1/6/2011	9:26:49 PM	PH3 valve closed
1/6/2011	9:26:49 PM	SiCl4 pre valve closed
1/6/2011	9:26:49 PM	SiCl4 post valve closed
1/6/2011	9:26:49 PM	Main Vac valve closed
1/6/2011	9:26:49 PM	Bypass valve closed
1/6/2011	9:26:49 PM	H2 valve opened
1/6/2011	9:26:49 PM	Bubbler valve opened
1/6/2011	9:26:49 PM	Helium MFC set to  0.000000
1/6/2011	9:26:49 PM	H2 MFC set to  500.000000
1/6/2011	9:26:49 PM	BCl3 MFC set to  0.000000
1/6/2011	9:26:49 PM	PHl3 MFC set to  0.000000
1/6/2011	9:26:49 PM	SiCl4 MFC set to  0.000000
1/6/2011	9:26:49 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:26:49 PM	Tube furnace set to 1000
1/6/2011	9:46:49 PM	Helium valve closed
1/6/2011	9:46:49 PM	PH3 valve closed
1/6/2011	9:46:49 PM	Main Vac valve closed
1/6/2011	9:46:49 PM	Bypass valve closed
1/6/2011	9:46:49 PM	H2 valve opened
1/6/2011	9:46:49 PM	BCl3 valve opened
1/6/2011	9:46:49 PM	SiCl4 pre valve opened
1/6/2011	9:46:49 PM	SiCl4 post valve opened
1/6/2011	9:46:49 PM	Bubbler valve opened
1/6/2011	9:46:49 PM	Helium MFC set to  0.000000
1/6/2011	9:46:49 PM	H2 MFC set to  500.000000
1/6/2011	9:46:49 PM	BCl3 MFC set to  1.800000
1/6/2011	9:46:49 PM	PHl3 MFC set to  0.000000
1/6/2011	9:46:49 PM	SiCl4 MFC set to  50.000000
1/6/2011	9:46:49 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	9:46:49 PM	Tube furnace set to 1000
1/6/2011	10:01:49 PM	H2 valve closed
1/6/2011	10:01:49 PM	BCl3 valve closed
1/6/2011	10:01:49 PM	PH3 valve closed
1/6/2011	10:01:49 PM	SiCl4 pre valve closed
1/6/2011	10:01:49 PM	SiCl4 post valve closed
1/6/2011	10:01:49 PM	Main Vac valve closed
1/6/2011	10:01:49 PM	Bypass valve closed
1/6/2011	10:01:49 PM	Helium valve opened
1/6/2011	10:01:49 PM	Bubbler valve opened
1/6/2011	10:01:49 PM	Helium MFC set to  500.000000
1/6/2011	10:01:49 PM	H2 MFC set to  0.000000
1/6/2011	10:01:49 PM	BCl3 MFC set to  0.000000
1/6/2011	10:01:49 PM	PHl3 MFC set to  0.000000
1/6/2011	10:01:49 PM	SiCl4 MFC set to  0.000000
1/6/2011	10:01:49 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	10:01:49 PM	Tube furnace set to 0
1/6/2011	10:21:49 PM	Helium valve closed
1/6/2011	10:21:49 PM	H2 valve closed
1/6/2011	10:21:49 PM	BCl3 valve closed
1/6/2011	10:21:49 PM	PH3 valve closed
1/6/2011	10:21:49 PM	SiCl4 pre valve closed
1/6/2011	10:21:49 PM	SiCl4 post valve closed
1/6/2011	10:21:49 PM	Main Vac valve closed
1/6/2011	10:21:49 PM	Bypass valve closed
1/6/2011	10:21:49 PM	Bubbler valve closed
1/6/2011	10:21:49 PM	Helium MFC set to  0.000000
1/6/2011	10:21:49 PM	H2 MFC set to  0.000000
1/6/2011	10:21:49 PM	BCl3 MFC set to  0.000000
1/6/2011	10:21:49 PM	PHl3 MFC set to  0.000000
1/6/2011	10:21:49 PM	SiCl4 MFC set to  0.000000
1/6/2011	10:21:49 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	10:21:49 PM	Tube furnace set to 0
1/6/2011	10:21:50 PM	Run finished at 10:21 PM
1/6/2011	10:43:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/6/2011	10:43:54 PM	Recipe started at 10:43 PM
1/6/2011	10:43:54 PM	Helium valve closed
1/6/2011	10:43:54 PM	H2 valve closed
1/6/2011	10:43:54 PM	BCl3 valve closed
1/6/2011	10:43:54 PM	PH3 valve closed
1/6/2011	10:43:54 PM	SiCl4 pre valve closed
1/6/2011	10:43:54 PM	SiCl4 post valve closed
1/6/2011	10:43:54 PM	Main Vac valve closed
1/6/2011	10:43:54 PM	Bubbler valve closed
1/6/2011	10:43:54 PM	Bypass valve opened
1/6/2011	10:43:54 PM	Helium MFC set to  0.000000
1/6/2011	10:43:54 PM	H2 MFC set to  0.000000
1/6/2011	10:43:54 PM	BCl3 MFC set to  0.000000
1/6/2011	10:43:54 PM	PHl3 MFC set to  0.000000
1/6/2011	10:43:54 PM	SiCl4 MFC set to  0.000000
1/6/2011	10:43:54 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	10:43:54 PM	Tube furnace set to 0
1/6/2011	10:44:55 PM	Helium valve closed
1/6/2011	10:44:55 PM	H2 valve closed
1/6/2011	10:44:55 PM	BCl3 valve closed
1/6/2011	10:44:55 PM	PH3 valve closed
1/6/2011	10:44:55 PM	SiCl4 pre valve closed
1/6/2011	10:44:55 PM	SiCl4 post valve closed
1/6/2011	10:44:55 PM	Bubbler valve closed
1/6/2011	10:44:55 PM	Main Vac valve opened
1/6/2011	10:44:55 PM	Bypass valve opened
1/6/2011	10:44:55 PM	Helium MFC set to  0.000000
1/6/2011	10:44:55 PM	H2 MFC set to  0.000000
1/6/2011	10:44:55 PM	BCl3 MFC set to  0.000000
1/6/2011	10:44:55 PM	PHl3 MFC set to  0.000000
1/6/2011	10:44:55 PM	SiCl4 MFC set to  0.000000
1/6/2011	10:44:55 PM	Bypass solenoid MFC set to  0.000000
1/6/2011	10:44:56 PM	Tube furnace set to 0
1/6/2011	10:44:56 PM	Run finished at 10:44 PM
1/6/2011	10:44:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
